权益分类	功能权益	普通用户	{{item.name}}会员
{{category.name}}	{{benefitItem.name}}

DEVELOPMENT OF CARBON COATING BY PLASMA CVD

通过等离子体 CVD 开发碳涂层

基本信息

批准号：
60880001
负责人：
SUGAI HIDEO
金额：
$ 3.14万
依托单位：
NAGOYA UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Developmental Scientific Research
财政年份：
1985
资助国家：
日本
起止时间：
1985 至 1986
项目状态：
已结题

项目摘要

A CARBON COATING TECHNIQUE, WHICH HAS BEEN EXPECTED AS A NEW IMPURITY CONTROL IN NUCLEAR FUSION, IS BASICALLY STUDIED. A PRESENT URGENT SUBJECT IN FUSION DEVICE COATING IS HOW TO REDUCE A LARGE AMOUNT OF HYDROGEN DESORBED FROM THE COATED WALLS. SO, WE SYSTEMATICALLY STUDIED THE COATING CONDITIONS TO MINIMIZE THE HYDROGEN CONTENT OF CARBON FILMS.A HOT-CATHODE DISCHARGE IN A TOROIDAL MAGNETIC FIELD AND A COLD-CATHODE GLOW DISCHARGE WITHOUT MAGNETIC FIELDS WERE USED FOR COATING. BESIDE THESE, WE DEVELOPED A NEW COATING METHOD CALLED A DOUBLE PLASMA. FROM THESE COATING EXPERIMENTS, WE OBTAINED A GUIDING PRINCIPLE OF REDUCING THE HYDROGEN CONTENT OF FILMS AS FOLLOWS:(1) COATING THE WALLS AT TEMPERATURES HIGHER THAN 400゜C. (2) COATING WITH SEVERE ION BOMBARDMENT ON THE WALLS. (3)ACETYLENE DISCHARGES REDUCE THE HYDROGEN CONTENT BY HALF, COMPARED WITH METHANE DISCHARGES.IN ADDITION, THE HYDROGEN CONTENT TURNED OUT TO BE ALMOST INDEPENDENT OF ADMIXING HYDROGEN OR HELIUM GASES, WHILE THE CARBON DENSITY OF FILMS IS DECREASED BY ADMIXED HYDROGEN. ON THE OTHER HAND, WE FOUND THAT THE HYDROGENS CAN BE DESORBED FROM THE CARBON FILMS BY HELIUM DISCHARGES. THIS HELIUM-DISCHARGE TREATMENT LOWERS THE HYDROGEN RECYCLING RATE LESS THAN 1. THUS, THE HELIUM GLOW DISCHARGE CAN BE USED AS A NEW RECYCLING CONTROL TECHNIQUE.BESIDES THE FUSION ORIENTED STUDIES CITED ABOVE, WE DEVELOPED AN ORIGINAL COATING METHOD, i.e., A DOUBLE PLASMA METHOD WHICH ENABLES US TO FORM DIAMOND-LIKE FILMS WITH HIGH QUALITY AND CONTROLLABILITY.

初步研究了一种有望成为新型核聚变杂质控制技术的碳包覆技术。如何减少从熔覆壁上大量解吸的氢是当前熔覆装置的一个紧迫课题。因此，我们系统地研究了涂层条件，以尽量减少碳膜的氢含量。采用环形磁场中的热阴极放电和无磁场的冷阴极辉光放电进行镀膜。除此之外，我们还开发了一种新的涂层方法，称为双等离子体。从这些涂层实验中，我们得到了降低膜中氢含量的指导原则：(1)在高于400 c的温度下对壁进行涂层。(2)涂层内壁有严重的离子轰击。(3)与甲烷排放相比，乙炔排放使氢含量减少一半。此外，氢含量几乎不受混合氢气或氦气的影响，而混合氢气会降低薄膜的碳密度。另一方面，我们发现氢可以通过氦放电从碳膜上解吸。这种放氦处理使氢气循环利用率低于1。因此，氦辉光放电可以作为一种新的回收控制技术。除了上面提到的以融合为导向的研究外，我们还开发了一种新颖的涂层方法，即双等离子体方法，使我们能够形成高质量和可控性的类金刚石膜。