Batchprocessed flexible micro grinding tools for end maching of metallic surfaces

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The current state of the research shows increasing requirements to the performance and efficiency of copper components with high surface quality and functionalized surfaces. As part of this project micro grinding tools will be produced by a novel procedure. However, up until now there is no knowledge of the boundary conditions of the thin film technology for high quality machining of micro grinding tools. At the beginning of the project the manufacturing process will be considered to achieve the defined goal. As regards to the demands made on the micro grinding tools the properties are being evaluated. Simultaneously, to optimize the mechanical precision machining, the electrochemical oxidation of the component surface is investigated. The grinding tools which are developed and manufactured for the use of micro-abrasiv grinding are examined on the following with regard to their behavior in the use. The next step is a process modeling concerning the different behavior of oxidized and non-oxidized surfaces. In addition, the removal behavior is described in terms of an empirical model. Based on the manufacture of suitable microstructures the established models are finally validated. Furthermore, the process strategy is considered. Furthermore, the established oxidation pocess for copper oxide, is transferred to other metals. Finally, a suited tool manufacturing for the transfer of various application scenarios takes place.