EBSD-system with 3D-functionality and heating stage

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The Institute of Micro- and Nanostructure Research runs the electron microscopy laboratory in the Center for Nanoanalysis and Electron Microscopy which constitutes the central facility for nanocharacterization of the Friedrich-Alexander University Erlangen-Nürnberg. The laboratory comprises, among other instruments, a state-of-the-art focused ion beam scanning electron micrsocope and a cutting-edge double-corrected transmission electron micrsocope.The instruments are extensively used to study the microscopic structure as well as structure-property relationships of functional and structural materials in a variety of research projects including a Research Training Group, two Collaborative Research Centers, two Priority Programs and the Excellence Initative. In order to further extend and fully employ the capabilities of the existing instruments for materials characterization a modern electron backscattered diffraction system has to be attached to the existing focused ion beam instrument. The system enables crystallographic investigation of materials including orientation mapping of polycrystals at the micro and nanoscale. Because of the high relevance of this information for the research carried out in Erlangen the electron backscatter diffraction system will be extensively used with all its modes. Fields of application include the site-specific preparation of samples for transmission electron microscopy and mechanical testing, strain mapping and three-dimensional analysis of crystal phases (by combination with the existing energy dispersive X-ray spectroscopy system and slice-and-view tomography). The compatible in situ heating stage will be used to study dynamical processes at elevated temperatures, like, e.g. texture evolution during grain growth and dewetting. The in situ investigation of such dynamical processes constitutes a research focus in Erlangen and, in particular, in the Research Training Group "In situ microscopy with electrons, X-rays and scanning probes".