Form Assessment by a Compressing Information Technique of Free-Surface Data

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This research program aimed to develop the measuring instrument for free-surface and data processing system of massive form-data. The main results are as follows.(1) Development of Three-Dimensional From Measuring SystemThe developed system consists of three-dimensional instrument, control device and computer system. The stylus to measure free-surface are set automatically. The table to set specimen is supported by air-bearings and positioned in accuracy of 0.1mum.The orientation of specimen is corrected by Fuzzyーcontrol program. This Fuzzy-control program is executed by in-process. By this process, the preparatory plan is very simplified.(2) Development of Algorithm to Compress Massive Data of Free-SurfaceThe measured data have noise signals and errors caused by discrete data. To remote these errors, this project developed the new algorithm to fit the three-dimensional spline function by optimization method. From this method, the data quantity to reproduce a free-surface is reduced to 40-60% of measured data quantity.