The Basic Research of Three-dimensional Measurements and Assessment of High-precision Contour Profile

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This researching objects are to develop the three-dimensional measuring system with wide measuring range and high resolution, and to buid up the algorythm of processing contour profile measured. The main results of this research were as follows.(1) The investigators developed the orthogonal three-coordinate measuring device which had the working volume of 150mmWide x 150mmDepth x 25mmHeight with the resolution of 0.5<mu>m in the horizontal plane and 0.01<mu>m in the vertical direction. This device was made up of 16 bits micro-computer to control the device and acquirde the profile data.(2) The spline function were introduced to fit the set of profile data by using the criterion of "TREND". This method reduced the data volume to 1/4.(3) The investigators provided the software to evaluate contour profiles measured by the three-coordinate system and the poler-coordinate system.