A Multi-Scale Measurement Method and Its Data Compression of from Surface Profiles to Form Errors

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This research aims to handle functional surface forms as multi-scale. The authors developed a wide-range measurement system that consists of a high-resolution microscope and of its stitching system. The type of microscope is selected as a scanning white light interference microscope because of its high resolution and high accuracy. The stitching is done firstly by moving a work horizontally in x, y directions relatively against the microscope. Data connection is carried through calculating optimization method and correlation method.The results of this research are (1) the multi-scale measurement system is accomplished, (2) the wide range measurement by stitching is useful for multi-scale assessment, (3) the truncation wear is measured as application and evaluated its volume precisely than the present method, and (4) this multi-scale measurement system is useful for other functionally important precision surface evaluation. The future subjects are (1) the application of this multi-scale measurement to non-plane surface like cylinder and other features, and (2) data system of huge amount multi-scale data, compression and its standardization.