Development of Three-Dimensional Measuring System for Wide-Range and High-Resolution

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This project developed the measurement and evaluation system for the both of dimension and form. The main results are as follows.(1) Wide-Range Measuring System for Cylindrical Parts and Data-Processing SystemIt was achieved that cylindrical parts like eccentric cam shafts or torus surfaces of rolling bearing could be measured in dynamic range of 10^6. This developed system was automatically driven by micro-computer and had a teaching function.As an eccentric cam surface or a torus surface does not have defined datum (s), the traditional techniques could not be applied to evaluate form errors. Then the project presented the new method named by "Iterative Least-Square Method". By this method, the measured data approach by degrees to solution under the condition to keep mutual positions among each data.(2) Wide-Range Measuring System for plane Parts and Data-Processing SystemIt was hard to recognize three-dimensionally layer structure like LSI pattern by SEM. By using above-mentioned techniques, this project developed the wide-range three-dimensional measuring system driven by PZT. In this system, hysteresis and creep of PZT were compensated by means of "the origin-reversion pulse control" which was originated in this research. In this system. measuring accuracy of about 4nm was realized and dynamic range was 10^5. The software to present form errors visually was prepared.