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Non-equilibrium Surface-Modification of Metals by Laser Irradiation in Various gas Atmospheres

各种气体气氛下激光辐照对金属的非平衡表面改性

基本信息

批准号：
01460222
负责人：
YAMAGUCHI Masaharu
金额：
$ 4.99万
依托单位：
Kyoto University
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (B)
财政年份：
1989
资助国家：
日本
起止时间：
1989 至 1990
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-01460222/
关键词：
Laser irradiation Nitride Oxide Surface Modification Film 薄膜作成窒化物膜酸化物膜

项目摘要

Pure metals (Al, Fe, Nb, Ni, Ti, W and Zr) have been irradiated in air, N_2 and Ar+NH_3 gas using a high-power pulse laser, and surface products have been identified by X-ray diffracto-metry. The results obtained for irradiation at 3x10^9 W/cm^2 can be summarized as follows.(1) W : Even by low-angle X-ray diffractometry, neither peaks corresponding to oxides nor those corresponding to nitrides were identified.(2) Zr and Nb : Diffraction peaks from ZrN were clearly identified for Zr irradiated in N_2 gas and in air. No oxide peak was identified in specimens irradiated in air. In low-angle X-ray diffraction spectra of Nb irradiated in both N_2 and air, small but clear peaks corresponding to Nb_2N are found.(3) Ti and Al : Peaks from TiN were clearly identified for Ti irradiated in N_2 gas and air. A small peak of TiO_2 was also identified in for Ti irradiated in air. The presence of TiO was not clarified since the peak positions of TiO and TiN are almost overlapped. Because the peak positions of TiN are identical for the specimens irradiated in both N_2 gas and air, TiO did not seem to be produced. Formation of AIN was also identified.(4) Fe and Ni : No peaks corresponding to any nitrides or oxides were identified in specimens irradiated in N_2 gas. On Ni irradiated in air, NiO was identified. On Al and Fe irradiated in air, neither oxide nor nitride was identified, even by low-angle X-ray diffractometry. These metals were heavily damaged by irradiation in N_2 gas and air.(5) Nb, Zr, and Ti, which have higher boiling points than 3500 K, about the maximum surface temperature attained by the present laser irradiation, show the formation of nitrides for irradiation in both N_2 and air. On the other hand, nitride formation is not identified for the other metals, Fe, and Ni, with boiling points lower than 3500 K by X-ray diffractometry.

用高功率脉冲激光在空气、N_2和Ar+NH_3气体中对纯金属(Al、Fe、Nb、Ni、Ti、W和Zr)进行了辐照，并用X射线衍射仪对表面产物进行了鉴定。在3×10~(-9)W/cm~(-2)的辐照条件下，得到的结果如下：(1)W：即使用小角X射线衍射仪也没有观察到与氧化物和氮化物对应的衍射峰，(2)在氮气和氮气中辐照的Zr和Nb的衍射峰清晰可见。在空气中辐照的样品中没有观察到氧化峰。在N_2和空气中辐照的Nb的小角X射线衍射谱中，有与Nb_2N对应的小而清晰的峰。(3)在N_2和空气中辐照的钛的TiN和Al：峰被清晰地识别出来。在空气中辐照后的钛也出现了一个小的二氧化钛峰。由于TiN和TiN的峰位几乎重叠，因此不能确定TiN的存在。由于在氮气和空气中辐照的样品中TiN的峰位相同，所以似乎没有生成TiO。(4)Fe和Ni：在N_2气体中未发现与任何氮化物或氧化物相对应的峰。在空气中辐照的镍上，有NiO的存在。在空气中辐照的Al和Fe上，即使用小角X射线衍射仪也没有观察到氧化物和氮化物。这些金属在N_2气体和空气中的辐照损伤严重。(5)Nb、Zr和Ti的沸点高于3500 K，约为目前激光照射的最高表面温度，表明在N_2和空气中都能形成氮化物。另一方面，对于沸点低于3500K的其他金属Fe和Ni，X射线衍射仪没有发现氮化物的形成。