Study on Single-Point Machining Technology of Supersmooth Surface Using a Flying Tool

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The present ultraprecision turning is based on the concept of motion copying so that the machining accuracies depend on the motion accuracies of a machine tool. The accuracies of a ultraprecision machine tool is worse than 10nm and it is very difficult to improve that in the near future. Then, a new single-point machining technology using a flying tool has been proposed in order to turn a supersmooth surface even if error motions exist on the machine tool. In the process, a discoid slider with a sapphire chip follows the prefinished surface by the action of hydrodynamic bearing. In this research project, the cutting mechanism of the technology was investigated as follows :(1) The height of the cutting edge was kept between the peak and the vally of the surface roughness so that the surface finish was improved due to the truncation.(2) The cutting depth varied following the vertical acceleration of workpiece surface with small delay, which has some possibility of improving the waviness.At the same time, a new optical inspection system has been developed using two quadrant photocells in order to measure the profile of the workpiece on the machine and the posture of the slider in the process. In the system the displacement was measured applying the principle of triangulation and the inclination angle was detected applying the principle of optical lever. The Surface profile was obtained through the integration of the angle. The results had a high repeatability and a high reliability with comparison of the measured data using other optical interferometric method.