Development of fixed abrasive tools utilizing sol-gel method

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Conventional vitrified grinding stones are manufactured utilizing by dry-state molding method so that homogeneity in dispersion of abrasives deteriorates when fine abrasives are used. Then sol-gel method was applied to manufacture grinding stones, which enabled production of homogeneous porous structure even if fine abrasives were used. As the result it was made clear that the sol-gel method was suitable for manufacturing of bridge-structured grinding stones with fine abrasives and the stone structure could be changed with composition of the starting solution. The hardness of the stones was changed by baking temperature with no change of the structure. Mirror finish of 25nmRy was accomplished using a GC#10000 stone in infeed grinding of a silicon wafer.