Preparation of ferroelectric single crystalline films by sol-gel processing

溶胶-凝胶法制备铁电单晶薄膜

• 批准号: 04453059
• 负责人: MIYAZAWA Kunichi
• 金额: $ 3.58万
• 依托单位: University of Tokyo
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (B)
• 财政年份: 1992
• 资助国家: 日本
• 起止时间: 1992 至 1993
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-04453059/
• 关键词: Sol-gel; PZT; Single crystal; Piezo film; Zirconia; Stainless steel; Insulator; Colloid; ゾル-ゲル; ゾル-ゲル法; セラミック; コーティング; チタニア

The aim of this research is to obtain the fundamental knowledge to make single crystalline PZT films through sol-gel processing using the alkoxides of Zr and Ti. Coating liquids were prepared by dissolving the alkoxides and lead acetate trihydrate into n-prophy alcohol, dip- or spin-coated on MgO, SiO_2 and stainless steel substrates, and fired at 300-850ﾟC.Higher temperature was required in the SiO_2 substrate than the MgO substrate. By the heat treatment at 600ﾟC, perovskite phase was obtained in MgO and stainless steel substrates. (100) oriented films were realized by using a cleaved MgO substrate. In order to make thick films for the actual uses such as sensors and actuators, multiple coatings were tried and a crack-free film with a thickness of 10,000nm was obtained. For the actual uses, preparation of substrates with good electric conductivity is important, and the substrates coated with ZrO_2-Y_2O_3 films for oxidation protection were prepared by the sol-gel processing. The insulating resistance of zirconia films showed a breakdown strength of the order of 10kV/mm. Preparation of PZT film on this substrate was also tried.

本研究的目的是为利用锆和钛的醇盐通过溶胶-凝胶法制备PZT单晶薄膜提供基础知识。将醇盐和三水醋酸铅溶于正丙醇中制成涂层液，用浸渍或旋涂的方法涂在MgO、SiO_2和不锈钢基体上，在300-850 ℃下烧成。SiO_2基体比MgO基体需要更高的温度。通过600 ℃热处理，在MgO和不锈钢基体中获得钙钛矿相。(100)取向膜通过使用解理的MgO衬底实现。为了制造用于传感器和致动器等实际用途的厚膜，尝试了多种涂层，并获得了厚度为10，000 nm的无裂纹膜。为了满足实际应用的需要，制备具有良好导电性能的基片是非常重要的，本文采用溶胶-凝胶法制备了ZrO_2-Y_2O_3复合氧化膜基片。氧化锆薄膜的绝缘电阻显示出10 kV/mm量级的击穿强度。还尝试了在此衬底上制备PZT薄膜。

项目成果

K.Miyazawa, K.Higuchi, K.Suzuki and T.Sakuma: "Microstructural analysis of the interface between sol-gel derived thin films and metal/ceramics substrate" Abst.of the 3rd IUMRS Int.Conf.on Advanced Materials. F-11-F-11. (1993)

K.Miyazawa、K.Higuchi、K.Suzuki 和 T.Sakuma：“溶胶-凝胶衍生薄膜与金属/陶瓷基材之间界面的微观结构分析”第三届 IUMRS Int.Conf.on Advanced Materials 摘要。

K.Miyazawa,J.Aoki and T.Sakuma: "Characterization of sol-gel derived zirconia films coated on austentic stainless steel substrate" Abst.7th Int.Conf.on surface Mod.Tech.35-35 (1993)

K.Miyazawa、J.Aoki 和 T.Sakuma：“奥氏体不锈钢基材上涂覆的溶胶-凝胶衍生氧化锆薄膜的表征”Abst.7th Int.Conf.on surface Mod.Tech.35-35 (1993)

K.Higuchi,K.Miyazawa,K.Suzuki and T.Sakuma: "Microstructure observation of Sol-Gel derived PZT films" J.Mat.Sci.29. 436-441 (1994)

K.Higuchi、K.Miyazawa、K.Suzuki 和 T.Sakuma：“溶胶-凝胶衍生 PZT 薄膜的微观结构观察”J.Mat.Sci.29。

宮沢、佐久間: "ゾル-ゲル法によるジルコニアコーティング膜と接合界面のTEM観察" 日本金属学会講演概要 (秋期大会). 390-390 (1992)

Miyazawa, Sakuma：“通过溶胶-凝胶法对氧化锆涂层膜和结合界面进行TEM观察”日本金属学会讲座摘要（秋季会议）390-390（1992年）。

K.Miyazawa, J.Aoki and T.Sakuma: "Characterization of sol-gel derived zirconia coating films coated on aostentic stainless steel substrate" Abstracts of 7th Int.Conf.on Surface Modification Tech.35-35 (1993)

K.Miyazawa、J.Aoki 和 T.Sakuma：“奥氏体不锈钢基材上溶胶-凝胶衍生氧化锆涂层膜的表征”第七届 Int.Conf.on Surface Modification Tech.35-35 摘要 (1993)