Development of an ultra-small-sized motor with ellipsoidal shaft

超小型椭圆轴电机的研制

• 批准号: 05650143
• 负责人: KYUSOJIN Akira
• 金额: $ 1.66万
• 依托单位: Nagaoka University of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (C)
• 财政年份: 1993
• 资助国家: 日本
• 起止时间: 1993 至 1994
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-05650143/
• 关键词: friction force; impulsive force; X Y GAMMA positioning device; inertial slider; piezoelectric actuator; 圧電モータ; 円筒ラッピング; 積層型圧電素子; 楕円軸

Last fiscal year, we finished a ellipsoidal shaft by lapping and tried to rotate by pushing with a micrometer head, but failed. It is difficult to rotate a shaft very small amount using PZTs, because of the friction in contact parts and bearings.This fiscal year, we thought over again about this principle. We thought out a new mechanism, namely x y GAMMA positioning device using impulsive force without any bearings. Minimum step sizes were obtained as follows.minimum step size 0.05mu m in X direction0.05mu m in Y direction0.6 arcsec in GAMMA directionMotion errors were obtained as follows.motion errors over <plus-minus> 25mu m scan in X directi0.03mu m in Y direction0.6 arcsec in GAMMA directionmotion errors over <plus-minus> 250 arcsec scan inGAMMA directi0.03mu m in X direction0.03mu m in Y direction

上个财政年度，我们通过研磨完成了一个椭圆轴，并试图通过用千分尺头推动旋转，但失败了。由于接触部件和轴承之间的摩擦，使用PZT很难使轴旋转很小的量。本财年，我们重新思考了这一原理。提出了一种新的机构，即利用脉冲力的无轴承x y Gamma定位装置。最小步长如下：最小步长X方向0.05 μ m Y方向0.05 μ m Gamma方向0.6角秒运动误差如下：运动误差超过25 μ m X方向扫描Y方向0.03 μ m Gamma方向0.6角秒运动误差超过250角秒Gamma方向扫描X方向0.03 μ m Y方向0.03 μ m<plus-minus><plus-minus>

项目成果

磯部浩己 森口貴也 久曽神煌: "平面3自由度インパクト駆動機構の開発" 精密工学会誌(発表予定).

Hiroki Isobe、Takaya Moriguchi、Kira Kusojin：“平面三自由度冲击驱动机构的开发”日本精密工程学会杂志（待出版）。

磯部浩己 西雅文 久曽神煌: "高分解能インチワーク式移動機構の高速化" 精密工学会誌(発表予定).

Hiromi Isobe、Masafumi Nishi、Hiroshi Kusojin：“高分辨率英寸工作型移动机构的加速”日本精密工程学会杂志（待出版）。

Hiromi ISOBE,Takanari MORIGUCHI and Akira KYUSOJIN: "Development of piezodriven X Y GAMMA positioning device using impulsive force" Journal of Japan Society for precision Engineering. (to be contributed).

Hiromi ISOBE、Takanari MORIGUCHI 和 Akira Kyusojin：“使用脉冲力开发压电驱动 X Y GAMMA 定位装置”日本精密工程学会杂志。

Hiromi ISOBE,Masafumi NISHI and Akira KYUSOJIN: "Fast positioning of inchworm positioning device with high resolution" Journal of Japan Society for precision Engineering. (to be contributed).

Hiromi ISOBE、Masafumi NISHI 和 Akira Kyusojin：“高分辨率尺蠖定位装置的快速定位”日本精密工程学会杂志。