Development of an ultra-small-sized motor with ellipsoidal shaft

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Last fiscal year, we finished a ellipsoidal shaft by lapping and tried to rotate by pushing with a micrometer head, but failed. It is difficult to rotate a shaft very small amount using PZTs, because of the friction in contact parts and bearings.This fiscal year, we thought over again about this principle. We thought out a new mechanism, namely x y GAMMA positioning device using impulsive force without any bearings. Minimum step sizes were obtained as follows.minimum step size 0.05mu m in X direction0.05mu m in Y direction0.6 arcsec in GAMMA directionMotion errors were obtained as follows.motion errors over <plus-minus> 25mu m scan in X directi0.03mu m in Y direction0.6 arcsec in GAMMA directionmotion errors over <plus-minus> 250 arcsec scan inGAMMA directi0.03mu m in X direction0.03mu m in Y direction