Development of high precise coordinate measurement system using piezo-drive high-speed scanners

使用压电驱动高速扫描仪开发高精度坐标测量系统

• 批准号: 11650118
• 负责人: KYUSOJIN Akira
• 金额: $ 2.3万
• 依托单位: Nagaoka University of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1999
• 资助国家: 日本
• 起止时间: 1999 至 2000
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-11650118/
• 关键词: Laser tracking; Piezoelectric actuator; Micro positioning; Spatial coordinate measurement; Triangulation; Positioning in multi degrees-of freedom; 三角測量; 微動ステージ

As the first of all step of 3-D coordinates measurement, the one degree of freedom coarse motion unit was developed for one dimensional coordinate measurement in a wide range. Measurement system using the coarse motion unit was made and measuring accuracy of the system was done in one dimensional coordinate. Then, characteristic evaluation of corner cube was carried out first of all in this study. The following was confirmed : laser beam dispersion and lowering of the strength at time edge portion. Using this result, mirror control, which did not use the department, was conducted in respect of corner cube. Next, distance L was proofreaded to mirror and target. It was proven that the calibration was possible in 0.35mm error (0.035%) for about L=1000mm. And, the laser beam direction in the setting was calibrated. The rotation of the tracking station coordinate was obtained from the absolute coordinate of the coordinate measuring machine. Therefore the possibility of relative position identification method in using two tracking stations by this was found. Two-dimensional spatial coordinate measurements in the wide XY plane using this measuring system were carried out. The possibility of the practical application of three dimensional space coordinate measurement using the coarse and fine motion laser tracking station was found.

作为三维坐标测量的第一步，单自由度粗动单元是为大范围一维坐标测量而研制的。利用该粗动单元制作了测量系统，并在一维坐标系下对系统的测量精度进行了测试。然后，在本研究中首先进行了角隅棱镜的特性评价。确认了激光束分散和时间边缘部分的强度降低。使用该结果，对隅角棱镜进行不使用该部门的镜控制。接着，将距离L校正为镜像和目标。实验证明，在L=1000mm左右，标定误差为0.35mm（0.035%）。并且，校准了设置中的激光束方向。跟踪站坐标的旋转由坐标测量机的绝对坐标得到。利用该测量系统进行了宽XY平面内的二维空间坐标测量。为激光跟踪粗精站三维空间坐标测量的实际应用提供了可能性。

项目成果

森脇三造: "粗微動レーザトラッキングステーションを用いた高精度空間座標測定システムの開発-第3報 粗動レーザトラッキングステーションの開発-"1999年度精密工学会秋季大会学術講演会講演論文集. 634 (1999)

Sanzo Moriwaki：“使用粗精激光跟踪站开发高精度空间坐标测量系统 - 第 3 部分粗精激光跟踪站的开发 -”1999 年日本精密工程学会秋季会议学术会议论文集。 634（1999）

Hiromi Isobe, Kouhei Yoshii, Shinji Uchida and Akira Kyusojin: "Development of high accuracy spatial coordinate system using laser tracking station actuated by PZT (1st Report)-Development and verification of Fine motion tracking station-"Journal of Japan

Hiromi Isobe、Kouhei Yoshii、Shinji Uchida 和 Akira Kyusojin：“使用 PZT 驱动的激光跟踪站开发高精度空间坐标系（第 1 次报告）-精细运动跟踪站的开发和验证 -”Journal of Japan

磯部浩已: "圧電素子駆動レーザトラッキングステーションを用いた高精度空間座標測定システムの開発(第1報)-微動トラッキングステーションの開発と性能評価-"精密工学会誌. 第66巻第5号. 751-756 (2000)

Hiromi Isobe：“使用压电元件驱动的激光跟踪站的高精度空间坐标测量系统的开发（第1次报告）-微运动跟踪站的开发和性能评估-”日本精密工程学会杂志。第 66 卷第 5 期。751 -756 (2000)