Development of high-precise micro positioning stage with six degress of freedom by applying PZT hysteresis compensation.

近年来，在制造过程中需要提高生产效率和高精度的产品加工，其中使用了机器人。因此，需要开发高精度测量机器人等物体的位置和姿态的方法。增强坐标测量方法利用三角测量原理，从扫描激光束的旋转反射镜角度计算空间坐标。但是，这种方法的测量精度很大程度上取决于反射镜的角度分辨率。因此，我们的系统采用了粗细结合旋转机构的激光扫描仪。这种方法扫描激光束如下。1. 粗糙运动单元确定为反射镜的粗糙角度，反射到附近的测量点。2. 精细运动单元决定了反射镜的精确角度并反射到测点中心。3. 此时空间坐标由反射镜角度计算。这样就可以在大范围内实现高精度的空间坐标测量。并且，通过快速控制激光扫描器来跟踪运动目标，可以实现动态测量。到目前为止，二自由度的精细运动机构是激光扫描仪开发的第一步。压电陶瓷可实现高精度、高速的微小位移控制。通过在分钟范围内使用该测量系统，可以实现静态和动态的1维和2维测量。但是，对于球面反射镜所使用的目标，只能测量扫描器与目标之间约600mm的距离。

Recently, the improvement of the production efficiency and high precision product processing are required in the manufacturing process, where robots are used. So, the development of the way of measuring the position and posture of the object such as a robot and so on with the high accuracy is required.The enhanced coordinate measuring method calculates the spatial coordinate from rotation mirror angle that scans a laser beam, using the principle of the triangulation. But, the measuring accuracy of this method is greatly depended on the mirror angle resolution. So, our system used the laser scanner with coarse and fine combined rotation mechanism. This method scans the laser beam as follows. 1. Coarse motion unit decided as the rough angle of mirror and which reflected to measurement point near. 2. Fine motion unit decided as the precise angle of mirror and which reflected to measure point center. 3. Spatial coordinate is calculated from the angle of mirror at this time.High accurate spatial coordinate measurement becomes possible by this for the wide area. And, dynamic measurement is possible by controlling the laser scanners rapidly in order to track the moving target.So far the fine motion mechanism of a 2-degree of freedom was developed as the first step of the laser scanner development. The PZT, which could control about minute displacement at high speed in the high accurate, was used for the scanner actuator. And the measurement, which is static and dynamic by 1 and 2-dimensional measurement, was possible by using this measurement system in the minute range. But, only the measurement that of about distance that between scanner and target 600mm could be done that the target used for spherical mirror.