Development of high-precise micro positioning stage with six degress of freedom by applying PZT hysteresis compensation.

近来，在使用机器人的制造过程中，需要提高生产效率和高精度的产品加工。因此，需要开发高精度的机器人等物体的位置和姿态的测量方法。增强型坐标测量方法利用三角测量原理，从扫描激光束的旋转镜角度计算空间坐标。但是，这种方法的测量精度在很大程度上取决于反射镜的角度分辨率。因此，本系统采用了粗精结合旋转机构的激光扫描器。该方法如下扫描激光束。1.粗运动单位确定为反射镜的粗角度，反映到测量点附近。2.精动单元由反射镜反射到测量点中心的精确角度决定。3.通过此时的反射镜角度计算出空间坐标，使得大范围的高精度空间坐标测量成为可能。通过快速控制激光扫描仪跟踪运动目标，实现了动态测量。目前，作为激光扫描仪发展的第一步，开发了2自由度的精密运动机构。扫描器的驱动器采用压电陶瓷（PZT），该压电陶瓷可以在高精度下高速控制微小的位移。利用该测量系统，可以在微小范围内进行一维和二维的静态和动态测量。但是，对于球面镜的靶，只能测量扫描仪与靶之间600mm左右的距离。

Recently, the improvement of the production efficiency and high precision product processing are required in the manufacturing process, where robots are used. So, the development of the way of measuring the position and posture of the object such as a robot and so on with the high accuracy is required.The enhanced coordinate measuring method calculates the spatial coordinate from rotation mirror angle that scans a laser beam, using the principle of the triangulation. But, the measuring accuracy of this method is greatly depended on the mirror angle resolution. So, our system used the laser scanner with coarse and fine combined rotation mechanism. This method scans the laser beam as follows. 1. Coarse motion unit decided as the rough angle of mirror and which reflected to measurement point near. 2. Fine motion unit decided as the precise angle of mirror and which reflected to measure point center. 3. Spatial coordinate is calculated from the angle of mirror at this time.High accurate spatial coordinate measurement becomes possible by this for the wide area. And, dynamic measurement is possible by controlling the laser scanners rapidly in order to track the moving target.So far the fine motion mechanism of a 2-degree of freedom was developed as the first step of the laser scanner development. The PZT, which could control about minute displacement at high speed in the high accurate, was used for the scanner actuator. And the measurement, which is static and dynamic by 1 and 2-dimensional measurement, was possible by using this measurement system in the minute range. But, only the measurement that of about distance that between scanner and target 600mm could be done that the target used for spherical mirror.