Development of high-precise micro positioning stage with six degress of freedom by applying PZT hysteresis compensation.

近年来，在使用机器人的制造过程中，要求提高生产效率和高精度的产品加工。因此，需要开发高精度测量机器人等物体的位置和姿态的方法。改进的坐标测量方法利用三角测量原理，从扫描激光光束的转镜角度计算空间坐标。但是，这种方法的测量精度在很大程度上取决于镜面角度分辨率。因此，我们的系统采用了粗细组合旋转机构的激光扫描仪。该方法按如下方式扫描激光束。1.粗略运动单位确定为反射镜的粗略角度，反射到测量点附近。2.精密运动单元确定为反射镜的精确角度和反射点中心的测量值。3.从镜面角度计算空间坐标，为大范围高精度空间坐标测量提供了可能。通过对激光扫描仪的快速控制，实现动态测量，从而实现对运动目标的跟踪。目前，作为激光扫描仪研制的第一步，研制了两自由度的精细运动机构。扫描仪执行器采用PZT作为驱动元件，可以实现高速、高精度的微小位移控制。利用该测量系统，可以实现一维和二维测量的静态和动态测量。但是，球面反射镜的靶面只能测量扫描仪与靶面之间600 mm左右的距离。

Recently, the improvement of the production efficiency and high precision product processing are required in the manufacturing process, where robots are used. So, the development of the way of measuring the position and posture of the object such as a robot and so on with the high accuracy is required.The enhanced coordinate measuring method calculates the spatial coordinate from rotation mirror angle that scans a laser beam, using the principle of the triangulation. But, the measuring accuracy of this method is greatly depended on the mirror angle resolution. So, our system used the laser scanner with coarse and fine combined rotation mechanism. This method scans the laser beam as follows. 1. Coarse motion unit decided as the rough angle of mirror and which reflected to measurement point near. 2. Fine motion unit decided as the precise angle of mirror and which reflected to measure point center. 3. Spatial coordinate is calculated from the angle of mirror at this time.High accurate spatial coordinate measurement becomes possible by this for the wide area. And, dynamic measurement is possible by controlling the laser scanners rapidly in order to track the moving target.So far the fine motion mechanism of a 2-degree of freedom was developed as the first step of the laser scanner development. The PZT, which could control about minute displacement at high speed in the high accurate, was used for the scanner actuator. And the measurement, which is static and dynamic by 1 and 2-dimensional measurement, was possible by using this measurement system in the minute range. But, only the measurement that of about distance that between scanner and target 600mm could be done that the target used for spherical mirror.