Intelligent Computational Mechanics System for Micromachines Design

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In this study, we developed an intelligent computational mechanics system for micromachines design.When conceptual image and structure of micromachine are proposed, its physical and mechanical behaviors such as deformantion, thermal conduction and electromagnetics are automatically evaluated using computational mechanics simulations, those results are interpreted, and finally multi-dimensional design window of satisfactory solutions are derived.In addition, an interface for the system is developed using internet and virtual reality technology.In the first fiscal year, one of commercial solid modeler, an automated mesh generator using the fuzzy knowledge processing and computational geometry, and one of general-purpose finite element analysis sytem are integrated into a single CAE system.A module for design window search is implemented into the system.The system is successfully applied to a design of electrostatic micro wobble actuator.In the second fiscal year, a module for optimization based on genetic algorithms modified for real search space is developed, and implemeted into the system.The system is also successfully applied to a design of microaccelerometer based on a tunneling current concept.