Gold-Silicon Focussed Ion Beam System with Scanning Electron Microscope

对于具有离子的互补纳米纤维，需要高分辨率仪器，其允许以高度自动化在大面积上进行精确的纳米结构化。为此，需要具有良好的长期稳定性的离子束系统，以在晶片级模板上实现可靠的纳米结构化。在硅光子学、2D材料、材料物理学和等离子体学的计划研究活动中，需要用金和硅离子进行结构化。该系统将进一步实现局部离子注入到预制的纳米结构中。由于将加工直径高达4英寸的晶圆级衬底，因此需要具有最小拼接误差的铣削过程的激光干涉控制定位。使用该仪器，将实现最小的特征，而不会产生邻近效应。该系统将在跨越几个部门的多用户环境中使用。通过在软纳米科学中心（SoN）安装该系统，该仪器将提供给不同的用户群。计划中的纳米光子学、纳米等离子体以及光化学和生物学的跨学科项目的研究项目依赖于可再生的纳米结构，并将导致SoN的进一步协同作用。该仪器将提供纳米结构化能力，以补充现有技术，特别是将通过标记对准和自动化制造与目前可用的仪器兼容。

For complementary nanofabrication with ions a high resolution instrument is needed which allows for precise nanostructuring across large areas with a high degree of automation. For this purpose, an ion beam system with good long-term stability is needed to enable reliable nanostructuring on waferscale templates. Structuring with gold and silicon ions is needed for planned research activities in silicon photonics, 2D materials, material physics and plasmonics. The system will further enable local ion implantation into pre-fabricated nanostructures. Because waferscale substrates with diameters up to four inch will be processed, laser-interferometric controlled positioning of the milling process with minimal stitching errors is needed. With the instrument smallest features will be realized without proximity effects. The system will be employed in a multi-user environment spanning several departments. By installing the system in the Center for Soft Nanoscience (SoN), the instrument will be made available to a diverse user base. The planned research projects in nanophotonics, nanoplasmonics and interdisciplinary projects in photochemistry and biology rely on reproducible nanostructuring and will lead to further synergies in SoN. The instrument will provide nanostructuring capability complementary to existing technologies and will in particular be compatible with currently available instruments through marker alignment and automatized fabrication.