Gold-Silicon Focussed Ion Beam System with Scanning Electron Microscope

对于离子的互补纳米制造，需要一种高分辨率的仪器，它允许在高度自动化的情况下在大范围内精确地构建纳米结构。为此，需要一种具有良好长期稳定性的离子束系统来在晶片尺度的模板上实现可靠的纳米结构。计划中的硅光子学、2D材料、材料物理和等离子体研究活动需要金和硅离子的结构。该系统将进一步实现局部离子注入到预制纳米结构中。由于将加工直径最大为4英寸的晶片基板，因此需要用激光干涉技术控制对铣削过程的定位，并将缝合误差降至最低。利用该仪器，最小的特征将在没有邻近效应的情况下实现。该系统将在跨越几个部门的多用户环境中使用。通过在软纳米科学中心(SON)安装该系统，该仪器将提供给不同的用户群。计划中的纳米光子学、纳米等离子体研究项目以及光化学和生物学的跨学科项目依赖于可重复的纳米结构，并将在SON方面产生进一步的协同效应。该仪器将提供补充现有技术的纳米结构能力，特别是将通过标记对准和自动化制造与目前可用的仪器兼容。

For complementary nanofabrication with ions a high resolution instrument is needed which allows for precise nanostructuring across large areas with a high degree of automation. For this purpose, an ion beam system with good long-term stability is needed to enable reliable nanostructuring on waferscale templates. Structuring with gold and silicon ions is needed for planned research activities in silicon photonics, 2D materials, material physics and plasmonics. The system will further enable local ion implantation into pre-fabricated nanostructures. Because waferscale substrates with diameters up to four inch will be processed, laser-interferometric controlled positioning of the milling process with minimal stitching errors is needed. With the instrument smallest features will be realized without proximity effects. The system will be employed in a multi-user environment spanning several departments. By installing the system in the Center for Soft Nanoscience (SoN), the instrument will be made available to a diverse user base. The planned research projects in nanophotonics, nanoplasmonics and interdisciplinary projects in photochemistry and biology rely on reproducible nanostructuring and will lead to further synergies in SoN. The instrument will provide nanostructuring capability complementary to existing technologies and will in particular be compatible with currently available instruments through marker alignment and automatized fabrication.