Gold-Silicon Focussed Ion Beam System with Scanning Electron Microscope

对于离子互补纳米制造，需要一个高分辨率的仪器，它允许在高自动化程度的大范围内进行精确的纳米结构。为此，需要具有良好长期稳定性的离子束系统来实现在晶圆级模板上可靠的纳米结构。在硅光子学、二维材料、材料物理和等离子体动力学等领域的计划研究活动需要金离子和硅离子的结构。该系统将进一步使局部离子注入预制纳米结构。由于将加工直径达4英寸的晶圆级基板，因此需要激光干涉控制铣削过程的定位，使拼接误差最小。与仪器最小的特征将实现无接近效应。该系统将在跨多个部门的多用户环境中使用。通过在软纳米科学中心（SoN）安装该系统，该仪器将提供给不同的用户群。计划中的纳米光子学、纳米等离子体学以及光化学和生物学的跨学科研究项目都依赖于可重复的纳米结构，并将导致进一步的协同效应。该仪器将提供与现有技术互补的纳米结构能力，特别是通过标记对准和自动化制造与目前可用的仪器兼容。

For complementary nanofabrication with ions a high resolution instrument is needed which allows for precise nanostructuring across large areas with a high degree of automation. For this purpose, an ion beam system with good long-term stability is needed to enable reliable nanostructuring on waferscale templates. Structuring with gold and silicon ions is needed for planned research activities in silicon photonics, 2D materials, material physics and plasmonics. The system will further enable local ion implantation into pre-fabricated nanostructures. Because waferscale substrates with diameters up to four inch will be processed, laser-interferometric controlled positioning of the milling process with minimal stitching errors is needed. With the instrument smallest features will be realized without proximity effects. The system will be employed in a multi-user environment spanning several departments. By installing the system in the Center for Soft Nanoscience (SoN), the instrument will be made available to a diverse user base. The planned research projects in nanophotonics, nanoplasmonics and interdisciplinary projects in photochemistry and biology rely on reproducible nanostructuring and will lead to further synergies in SoN. The instrument will provide nanostructuring capability complementary to existing technologies and will in particular be compatible with currently available instruments through marker alignment and automatized fabrication.