权益分类	功能权益	普通用户	{{item.name}}会员
{{category.name}}	{{benefitItem.name}}

PVD coating device

PVD镀膜装置

基本信息

批准号：
440899948
负责人：
金额：
--
依托单位：
Technische Universität Dortmund
依托单位国家：
德国
项目类别：
Major Research Instrumentation
财政年份：
2020
资助国家：
德国
起止时间：
2019-12-31 至无数据
项目状态：
未结题

来源：
https://gepris.dfg.de/gepris/projekt/440899948?language=en
关键词：
PVD coating device

项目摘要

The applied research device provides the basis for the investigation of hybrid PVD coating processes based on high-energy plasmas in the form of High Power Pulsed Magnetron Sputtering technology combined with Arc technology. The synergies and potential for the development of new thin film systems with improved tribological properties arising from the simultaneous use of the two process variants represent a promising field of research. This will be investigated by considering the microstructure and phase composition of the thin films up to the real performance of coated tools in manufacturing processes. Consequently, scientific questions in the field of materials technology and application-related fundamental research in production engineering are addressed. On this basis, the coating device offers a multitude of new fields for tribological applications, which at the same time leads to an improvement of the system behavior by using the developed coating systems. In addition to improving the performance of tools, this also includes the friction-optimized and load-adapted synthesis of thin films for components and machine parts to reduce energy consumption and increase the overall performance. Furthermore, core problems of the recycling of sputter materials by new generatively manufactured targets and their application behavior in the coating process are investigated. The applied coating device thus consolidates the pioneering position in the field of plasma-assisted thin-film technology and at the same time strengthens Germany as a place for innovation and production.

该应用研究装置为基于高能等离子体的混合PVD涂层工艺的研究提供了基础，该工艺采用高功率脉冲磁控溅射技术与电弧技术相结合的形式。同时使用两种工艺变体所产生的具有改进的摩擦学性能的新薄膜系统的开发的协同作用和潜力代表了一个有前途的研究领域。这将通过考虑薄膜的微观结构和相组成来研究，以达到制造过程中涂层工具的真实的性能。因此，材料技术领域的科学问题和生产工程中与应用相关的基础研究得到了解决。在此基础上，涂层设备为摩擦学应用提供了许多新领域，同时通过使用开发的涂层系统改善了系统性能。除了提高工具的性能外，还包括摩擦优化和负载适应性薄膜的合成，用于组件和机器部件，以降低能耗并提高整体性能。此外，溅射材料的回收利用的新一代制造的靶和它们在涂层过程中的应用行为的核心问题进行了研究。因此，所应用的镀膜设备巩固了等离子体辅助薄膜技术领域的领先地位，同时加强了德国作为创新和生产基地的地位。