Active control of precise vibration isolation table using two degrees of freedom controller

使用二自由度控制器主动控制精密隔振台

• 批准号: 04650220
• 负责人: NORITSUGU Toshiro
• 金额: $ 1.28万
• 依托单位: Okayama University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (C)
• 财政年份: 1992
• 资助国家: 日本
• 起止时间: 1992 至 1993
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-04650220/
• 关键词: Precise vibration isolation table; Pneumatic servo; Active control; Two degrees of freedom control; Vibration control; 2自由度サーポ系; 空気圧駆動系

Precise instruments such as an electron microscope and a micro machine currently interested have to be installed on a precision vibration isolation table generally comprising air springs. The table must provide with functions of both the vibration absorption and the fast and accurate positioning. The absorption requires the soft spring, the positioning does the hard one. To cope with such a mutually contradictory requirements, a conventional passive isolation system is not sufficient, which should be actively controlled.Considering the vibration absorption as a disturbance suppression and the positioning as a tracking to desired inputs, the concept of a two degrees of freedom control may be effective to reconcile both requirements. Further, as the table is a motion mechanism with multi-degrees of freedom, some problems of coupling among each degree of freedom appear in the control. Regarding coupling forces as a kind of disturbance, the decoupling owing to the disturbance suppression function may be expected. This study investigates the availability of two degrees of freedom controller to a pneumatic vibration isolation table, also of which a design approach is proposed. Comparing its control performance with that obtained from PI controller, the effectiveness of the two degrees of freedom control to the pneumatic vibration isolation table is assured.

目前感兴趣的精密仪器，如电子显微镜和微型机器，必须安装在通常由空气弹簧组成的精密隔振台上。工作台必须既具有减振功能，又具有快速准确的定位功能。吸收要软弹簧，定位要硬弹簧。为了应对这种相互矛盾的要求，传统的被动隔震系统是不够的，必须进行主动控制，将减振视为干扰抑制，将定位视为对期望输入的跟踪，两自由度控制的概念可能有效地协调这两种要求。此外，由于转台是一个多自由度的运动机构，在控制中出现了各个自由度之间的耦合问题。将耦合力视为一种扰动，利用扰动抑制功能实现解耦是可以预期的。研究了气动隔振台采用两自由度控制器的可行性，并提出了一种设计方法。将其控制性能与PI控制器的控制性能进行了比较，证明了两自由度控制对气动隔振台的有效性。

项目成果

Toshiro Noritsugu: "Active control of pneumatic vibration isolation table using two degrees of freedomn controller" Proceedings of the Second JHPS International Symposium on Fluid Power. 683-688 (1993)

Toshiro Noritsugu：“使用二自由度控制器对气动隔振台进行主动控制”第二届 JHPS 国际流体动力研讨会论文集。