New Method for Analyzing the Periodic Structure of Multilayr by Diffeirential anomalous Small-Angle X-ray Scatering

微分反常小角X射线散射分析多层膜周期结构的新方法

• 批准号: 05805052
• 负责人: MATSUBARA Eiichiro
• 金额: $ 1.28万
• 依托单位: KYOTO UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (C)
• 财政年份: 1993
• 资助国家: 日本
• 起止时间: 1993 至 1994
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-05805052/
• 关键词: Anomalous dispersion effect; multilayr; Cu; Co; energydifferential anomalous small angle scattering; 界面構造; 小角散乱; Cu; 界面構造解析; 放射光

A new method has been proposed for analyzing the periodic structure of a multilayred sample by the differential anomalous small-angle x-ray scattering method in the reflection geometry. The scattering peaks due to the periodically layred structure in the small angle region are often observed with a large background intensity. These peak intensities strongly depend upon the anomalous dispersion terms of the constituent clement near its absorption edge. Thus, by taking a difference of these peak intensities observcd at two encrgics near the edge. the scattering intensity attributed to various causes can be accurately eliminated except the periodically layred structure. Namely, only the intrinsic peak intensities are precisely determined by this method. Furthermore, this method is the most effective for analyzing the periodic structures of multilaycrs composed of the next neighboring clements in the periodic table. The experimental details and the usefulness of the present new method have been presented by obtaining the concentration profile of a Cu/Co multilayr using the peak intensity variation arising from the anomalous disperion terms of Cu and Co near their K absorption edges.

提出了一种用反射几何中的微分反常小角X射线散射法分析多层样品周期结构的新方法。在小角度区域，由于周期性的层状结构而产生的散射峰通常具有较大的背景强度。这些峰值强度强烈地依赖于元素组分在其吸收边附近的反常色散项。因此，通过取这些峰值强度的差值，可以在靠近边缘的两个势垒处观察到。除周期性铺设结构外，由于各种原因引起的散射强度可被准确消除。也就是说，这种方法只精确地确定了本征峰值强度。此外，这种方法对于分析元素周期表中相邻元素组成的多层结构是最有效的。通过利用铜和钴在其K吸收边附近的反常色散项引起的峰值强度变化获得了铜/钴多层膜的浓度分布，给出了实验细节和新方法的实用性。

项目成果

K.Kato, E.Matrudara, M.Saito, T.Kosaka, Y.Waseda and K.Inomata: "New Method for Analyzing the Peiodic structare of Multilayr by Diffenential Anomalons Small-Angle X-ray Scatteing" Meter.Irans.JIM.Vol.36, No.3 (to be publisled). (1995)

K.Kato、E.Matrudara、M.Saito、T.Kosaka、Y.Waseda 和 K.Inomata：“通过微分异常小角度 X 射线散射分析多层周期性结构的新方法” Meter.Irans.JIM

E.Matsubare and Y.Waseda: "Structured Study of Cu/Co Multilayr by Anomalous Small Angle X-ray Scattering" Sci.Rep.Res.lnst.Tohoku Unir.A. Vol.38, No.1. 14-23 (1993)

E.Matsubare 和 Y.Waseda：“通过反常小角度 X 射线散射对 Cu/Co 多层进行结构研究”Sci.Rep.Res.lnst.Tohoku Unir.A。

Eiichiro Matsubara and Yoshio Waseda: "Structural Study of Cu/Co Multilayer by Anomalous Small-Angle X-ray Scattering" Sci.Rep.RITU.A. 38. 14-23 (1993)

Eiichiro Matsubara 和 Yoshio Waseda：“通过反常小角 X 射线散射进行 Cu/Co 多层结构研究”Sci.Rep.RITU.A。

E.Matsubara et al.: "Structural Study of Cu/Co Multilayer by Anomalous Small-Angle x-ray Scattering" Sci. Rep. Res. Inst. Tohoku Univ. A. 38. 14-23 (1993)

E.Matsubara 等人：“通过反常小角 X 射线散射进行 Cu/Co 多层结构研究”Sci。

K. Kato et al.: "New method for Analyzing the Periodic Structure of multilayer by Differential Anomalous Small-Angle x-ray Scattering" Matirials Jrans JIM. 36. (1995)

K. Kato 等人：“通过微分反常小角 X 射线散射分析多层周期性结构的新方法”Matrials Jrans JIM。