Integrated solution for lokal, electron channeling based stress and strain measurement in the scanning electron microscope (εpsilator.X3)

许多材料的性能来源于其纳米和微观结构。虽然这些材料的几何结构可以通过已经建立的方法在宏观，微观和纳米水平上进行表征，但许多领域的局部性质可以在宏观水平上确定，但只能部分地在微观水平上确定。特别是局部机械应力和变形还不是没有设备上的巨大支出，例如同步加速器中的XRD，其在微米和纳米尺度上以足够的可靠性和空间精度可测量。但是对于微观结构的发展和表征，它们是相当感兴趣的。近年来，电子显微镜中的局部变形分析的大量新方法已经被开发和增强，尽管这些方法中的大多数仍在开发中。除了对SEM图像进行数字图像相关（DIC）之外，一种主要的新方法是使用电子背散射衍射（EBSD），特别是高分辨率（HR）EBSD进行变形分析。后者代表DIC和EBSD的组合，并允许空间高分辨率，高精度地确定晶格的变形状态（应变和旋转），但到目前为止只能使用商业软件CrossCourt进行。此外，软件本身以及EBSD技术的性质也会引起某些问题。因此，该技术是不敏感的流体静力学应变，并提供相对于一个局部参考点的变形数据。关于这些限制，这里使用的方法的适应旧的选择区域沟道（SAC）是有前途的。SAC以电子衍射图案的形式提供类似于EBSD的数据。然而，SAC提供了高得多的质量和角分辨率的图案。这使得能够使用HR-EBSD基础方法进行更准确的变形测量。最初为EBSD模式开发的菊池带方法（KBM）的适应性进一步允许访问流体静力应变部分。此外，可以设想使用动态模拟图案作为参考点，这又允许绝对变形测量。所有这些方法的关键是图案的有效索引，即相关晶体取向的确定和相关图像细节的识别。到目前为止，只有通过相对较新的字典索引（DI），SAC的模式才有可能做到这一点。这里列出的方法部分复杂，计算量很大，但有很好的文档记录，并且在模式模拟和字典索引的情况下，可以通过开源软件EMsoft访问。本项目旨在将这些方法联合收割机结合起来，使变形测量的精度超过以前基于SEM的方法。为了对这一工具进行必要的验证和校准，还将进行适当的实验。

The properties of many materials originate from their nano- and microstructure. While the geometric structures of these materials can be characterized by already established methods at the macro, micro and nano level, the local properties in many fields can be determined at the macro level but only partially at the micro level. Especially local mechanical stresses and deformations are not yet without great expenditure on equipment, e.g. XRD in the synchrotron, measurable on the micro and nano scale with sufficient reliability and spatial accuracy. But for microstructure development and characterization they are of considerable interest. In recent years, a large number of new methods for local deformation analysis in electron microscopy have been developed and enhanced, although most of these methods are still under development. In addition to digital image correlation (DIC) on SEM images, a major new methodology was the deformation analysis using electron back scatter diffraction (EBSD), in particular high-resolution (HR) EBSD. The latter represents a combination of DIC and EBSD and allows a spatially high resolved, highly accurate determination of the deformation state (strain and rotation) of the crystal lattice, but so far can only be performed using the commercial software CrossCourt. Additionally the software itself as well as the nature of the EBSD technology give rise to certain problems. The technique is therefore insensitive to hydrostatic strains and provides only deformation data relative to a local reference point. Regarding these limitations, the adaptation of the methods used here to the older selected area channeling (SAC) is promising. SAC provides data akin to EBSD in the form of electron diffraction patterns. However, SAC provides pattern in much higher quality and angular resolution. This enables more accurate deformation measurements with the methods underlying HR-EBSD. The adaptation of the Kikuchi bandlet method (KBM) originally developed for EBSD patterns further allows access to the hydrostatic strain parts. In addition, the use of dynamically simulated patterns as a reference point is conceivable which in turn allows absolute deformation measurements. Critical to all these methods is an effective indexing of the pattern, i.e. the determination of the associated crystal orientation and identification of relevant image details. Up to now, this has only been possible for SAC's patterns through relatively new dictionary indexing (DI). The methods listed here are in parts complex and computationally very intensive, but well documented and in the case of pattern simulation and dictionary indexing accessible via the open source software EMsoft. This Project aims to combine these methods to allow deformation measurement with an accuracy exceeding previous SEM based methods. For the necessary validation and calibration of this tool, suitable experiments will also be carried out.