Preparation of Ordered Anodic Porous Alumina and Its Functional Applications

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In this study, the formation of highly ordered anodic porous alumina and its application to various kinds of functional devices were investigated. The obtained results were as follows.(1) The conditions for the highly ordered anodic porous alumina were widely investigated.(2) Concerning the pretexturing process, in which textured patterns generate the ordered hole arrangement of anodic porous alumina, two types of processes were studied; the process using a mold prepared by EB lithographic process, and the process using the ordered array of small particles as a template. Based on these processes, highly ordered anodic porous alumina could be obtained.(3) For the quantitative evaluation of the degree of the ordering of hole arrangement in the anodic porous alumina, Fourier transformation analysis of the SEM images was found to be useful.(4) Several types of replicating process of the ordered hole structures of anodic porous alumina were developed successfully to prepare the ordered nanohole array of metal, polymer an carbon.(5) Obtained highly ordered anodic porous alumina was applied to various functional devices, such as, microfiltration, membrane emaufication, high density magnetic recording g media, and preparation of functional bio devices and so on.