Fabrication of ultra high density nanohole array using combination of top-down and bottom-up approaches and its application for a high density magnetic storage media

利用在硅衬底上形成的多孔氧化铝纳米孔阵列，成功地制备出密度为200G~2.5TRA/平方英寸的超高密度铁磁纳米棒阵列。纳米棒的最小直径为10 nm，室温下的矫直力为2.0kOe。此外，我们采用了自上而下和自下而上相结合的技术，即电子束刻蚀和铝阳极氧化技术，成功地实现了有序纳米孔阵列的收缩。

We succeeded in the fabrication of ultra high density ferromagnetic nanorod array which density was ranged from 200 Giga to 2.5 Tera per square inch, using porous alumina nanohole array formed on Si substrate. The smallest diameter of nanorod is 10 nm, and the coercivity at room temperature is 2.0 kOe. Furthermore, we succeeded in shrinkage of the ordered nanohole array using a combination of top-down and bottom-up technology, namely, ion beam etching with electron beam lithography and anodic oxidation of aluminum.