Vacuum chamber with seismic isolation of an optical test platform

需要一个主动和被动隔震的真空系统，以建立一个测试设施，用于开发惯性传感器和未来地面引力波探测器的仪器。这种探测器旨在将低频性能提高几个数量级，为此，他们必须设计新的策略来降低地震噪声和测试质量控制。这里要求的设施将使我们能够模拟我们实验室中大型探测器所达到的条件，反过来，这使我们能够灵活地部署，开发和测试各种传感器。为此，需要一个具有相应大开口的大型真空室来创建一个理想的设备，以执行这种传感器的微调和组装。测试体位于隔离的光学面包板上方，其尺寸使我们能够部署高度高达1.2米的镜子悬架。约1.5m的体积长度也使我们能够实现这种悬架之间的光学谐振器配置。隔离概念结合了商业上现成的产品，在真空外壳内建立了腔室的主动隔离和面包板的被动隔离。选择这种方法是为了使系统快速可用，而嵌套的主动和被动隔离相结合将使我们能够在未来的实验中不断优化隔离和调优。该概念包括，新型传感器可以快速测试，而无需等待或调整以适应更严格的要求和在更大的可用基础设施中进行此类测试的时间表。

A vacuum system with active and passive seismic isolation is requested to establish a test facility for the development of inertial sensors and instruments for future ground-based gravitational wave detectors. Such detectors aim to improve low-frequency performance by several orders of magnitude and to this end, they have to devise novel strategies to reduce seismic noise and test mass control. The here requested facility will enable us to emulate the conditions achieved at large detectors in our laboratory and, in turn, this allows us to flexibly deploy, develop and test various sensors. To this end, a large vacuum chamber with correspondingly large opening is required to create a facility that is ideal to perform fine adjustment and assembly of such sensors. The test volume, situated above an isolated optical breadboard, has dimensions that enable us to also deploy mirror suspensions with a height of up to 1.2m. The length of the volume of about 1.5m also enables us to realize and optical resonator configuration between such suspensions. The isolation concept combines commercial-off-the-shelf items to establish an active isolation of the chamber and a passive isolation of the breadboard inside the vacuum envelope. This approach was chosen to make the system quickly available, while the combination of nested active and passive isolation will enable us to continuously optimize the the isolation and tuning in future experiments. The concept includes, that novel sensors can be tested quickly, without needing to wait or adjust to the more stringent requirements and schedules of such tests in the larger, available infrastructures.