SYNERGY OF CERAMIC FILM AND PLASTIC SUBSTRATE

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The structure of metal-hydroxyls fabricated using atmospheric chemical vapor deposition(CVD)is thought to be similar to that of dried gel bulks fabricated using so-gel method, except existence of alkyl base. In this study, the extended experiment was performed to obtain crystalline metal-oxide films on the plastic substrate. The metal-hydroxyl films were fabricated on the Si, silica glass, PET and polyimides at relatively low temperature. These films were annealed to form crack-free crystalline films at relatively low temperature. The behavior of crystallization of the sample was determined using infrared absorption spectroscopy, X-ray diffractometry, scanning electron microscopy, differential scanning calorimetry. First of all, the amorphous titanium hydroxyl films were synthesized by an atmospheric CVD apparatus at the substrate temperature of 120°C-360°C and the gas temperature below 300°C.Then the samples were treated at the temperatures below 500°C.Although the sample fabricated at relatively low substrate temperatures(e.g.200°C)crystallization begins relatively low annealing temperature, the sample fabricated at relatively high substrate temperatures(e.g.280°C)crystallization begins relatively high annealing temperature. In obtaining crystalline coating on the plastic substrate by post-annealing without cracks, amorphous metal-hydroxyl films with large free-volume are needed.