DEVELOPMENT OF MAGNETIC RECORDING HEAD WITH NEW HARD MATERIAL-AMORPHOUS CARBON NITRIDE COATING

将非晶态氮化碳薄膜用于坡莫合金磁头的抗磨损涂层。由于我们预期在氮化碳的初始生长过程中存在决定薄膜磨损的因素，因此研究了氮化碳薄膜的磨损特性和磁带运行的抗磨损性能。扫描电镜显示，经ECR等离子体CVD技术沉积15分钟的薄膜在沉积前经过抛光处理后立即从基片上脱落，并且未经任何处理而保留在基片上。经过表面抛光处理后，α相完全消失，β相暴露于气相中。在衬底温度为200℃时，α相中氮和碳的扩散系数是β相中氮和碳扩散系数的100倍。因此，这些结果表明，在薄膜和衬底之间的界面上的梯度组成区域使它们之间的结合很强。在坡莫合金头部沉积了厚度为100 nm的非晶氮化碳薄膜。然后以4.76cm/s的速度运行录音磁带进行抗磨损性能测试。胶卷在一小时内就被完全毁掉了。此外，还在用于数字录像带磁带记录的铁氧体磁头上形成了另一种氮化碳薄膜。采用10m/s速度的录音磁带进行了抗磨损性能试验。运行3-5分钟后，所有样品均出现微裂纹。这些裂缝随着运行时间的延长而发展。综上所述，非晶态氮化碳薄膜仍不能用于磁头涂层。未来还需要在薄膜沉积过程中控制温度和离子加速方面做出更多的努力。本研究的详细内容见web: http://hts.chem.nagaokaut.acjp。

Amorphous carbon nitride fllms were used for anti-wearing-out coatings of Permalloy magmetic heads. Since we expected that there was a factor for decision of the abrasion of the film in the initial growth process of carbon nitride, abrasion characteristic of the films and anti-wearing-out function using recording tape running were investigated. Scanning electron microscopy revealed that the films deposited by an ECR plasma CVD technique for 15 minutes were peal off immediately form the the substrate whose surface was polished before deposition, and remained on that without any treatments. After polishing procedure of the surface, alpha phase completely disappeared and beta phase was exposed to the gas phase. At a substrate temperature of 200C,diffusion coefficients of nitrogen and carbon in alpha phase are 100 times greater that those in beta phase. Therefore, these results suggest that the gradient composition area at the interface between the film and the substrate makes strong bond between them. The amorphous carbon nitride films were deposited on the Permalloy head with a thickness of 100 nm. Then the anti-wearing-out function test using recording tape running with 4.76cm/s was performed. The films were completely destroyed within 1 hour. In addition, another carbon nitride films were formed on the ferrite head used for digital-video-cassette tape recording. The anti-wearing-out function test using recording tape running with 10m/s was performed. The micro cracks were seen on all sample after 3-5 minutes running. These cracks developed with running duration. In conclusion, amorphous carbon nitride films are not still available for magnetic head coatings. Additional efforts related to controlling temperature and ion accelerating in the deposition process of the films are required in the future. The details of this research are provided on the web, http : //hts.chem.nagaokaut.acjp.