DEVELOPMENT OF MAGNETIC RECORDING HEAD WITH NEW HARD MATERIAL-AMORPHOUS CARBON NITRIDE COATING

将非晶态氮化碳薄膜用于坡莫合金磁头的耐磨涂层。由于我们认为在氮化碳的初始生长过程中有一个决定薄膜磨损的因素，因此研究了薄膜的磨损特性和使用记录磁带运行时的抗磨损功能。扫描电子显微镜显示，ECR等离子体CVD技术沉积15min的薄膜在沉积前表面经过抛光后立即从衬底上剥离，并且在没有任何处理的情况下保持在衬底上。经过表面抛光处理后，α相完全消失，β相暴露在气相中。当衬底温度为200℃时，氮和碳在α相中的扩散系数比在β相中的扩散系数大100倍。因此，这些结果表明，薄膜和衬底界面处的梯度成分区域使两者之间形成了很强的结合。在坡莫合金磁头上沉积了厚度为100 nm的非晶态氮化碳薄膜。然后用记录带以4.76 cm/S的速度运行，进行抗磨损性能测试。胶卷在1小时内被完全销毁。此外，还在用于数字盒式磁带记录的铁氧体磁头上形成了另一种氮化碳薄膜。进行了以10m/S速度运行的录音磁带的抗磨损性能试验。运行3-5分钟后，所有试件均出现微裂纹。这些裂纹随着运行时间的延长而发展。总之，非晶态氮化碳薄膜不再适用于磁头涂层。未来还需要在薄膜沉积过程中控制温度和离子加速方面的额外努力。这项研究的详细情况可在网站http：//hts.Chem.nagaokaut.acjp上提供。

Amorphous carbon nitride fllms were used for anti-wearing-out coatings of Permalloy magmetic heads. Since we expected that there was a factor for decision of the abrasion of the film in the initial growth process of carbon nitride, abrasion characteristic of the films and anti-wearing-out function using recording tape running were investigated. Scanning electron microscopy revealed that the films deposited by an ECR plasma CVD technique for 15 minutes were peal off immediately form the the substrate whose surface was polished before deposition, and remained on that without any treatments. After polishing procedure of the surface, alpha phase completely disappeared and beta phase was exposed to the gas phase. At a substrate temperature of 200C,diffusion coefficients of nitrogen and carbon in alpha phase are 100 times greater that those in beta phase. Therefore, these results suggest that the gradient composition area at the interface between the film and the substrate makes strong bond between them. The amorphous carbon nitride films were deposited on the Permalloy head with a thickness of 100 nm. Then the anti-wearing-out function test using recording tape running with 4.76cm/s was performed. The films were completely destroyed within 1 hour. In addition, another carbon nitride films were formed on the ferrite head used for digital-video-cassette tape recording. The anti-wearing-out function test using recording tape running with 10m/s was performed. The micro cracks were seen on all sample after 3-5 minutes running. These cracks developed with running duration. In conclusion, amorphous carbon nitride films are not still available for magnetic head coatings. Additional efforts related to controlling temperature and ion accelerating in the deposition process of the films are required in the future. The details of this research are provided on the web, http : //hts.chem.nagaokaut.acjp.