DEVELOPMENT OF MAGNETIC RECORDING HEAD WITH NEW HARD MATERIAL-AMORPHOUS CARBON NITRIDE COATING

新型硬质材料-非晶氮化碳涂层磁头的研制

• 批准号: 08555176
• 负责人: SAITOH Hidetoshi
• 金额: $ 1.28万
• 依托单位: NAGAOKA UNIVERSITY OF TECHNOLOGY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 1996
• 资助国家: 日本
• 起止时间: 1996 至 1997
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-08555176/
• 关键词: amorphous film; carbon nitride; hard films; magnetic recording head; Permalloy; ECR plasma CVD; Auger electron spectroscopy; adhesion; 窒化炭素; オ-ジエ電子分光法; 窒素インプランテーション

Amorphous carbon nitride fllms were used for anti-wearing-out coatings of Permalloy magmetic heads. Since we expected that there was a factor for decision of the abrasion of the film in the initial growth process of carbon nitride, abrasion characteristic of the films and anti-wearing-out function using recording tape running were investigated. Scanning electron microscopy revealed that the films deposited by an ECR plasma CVD technique for 15 minutes were peal off immediately form the the substrate whose surface was polished before deposition, and remained on that without any treatments. After polishing procedure of the surface, alpha phase completely disappeared and beta phase was exposed to the gas phase. At a substrate temperature of 200C,diffusion coefficients of nitrogen and carbon in alpha phase are 100 times greater that those in beta phase. Therefore, these results suggest that the gradient composition area at the interface between the film and the substrate makes strong bond between them. The amorphous carbon nitride films were deposited on the Permalloy head with a thickness of 100 nm. Then the anti-wearing-out function test using recording tape running with 4.76cm/s was performed. The films were completely destroyed within 1 hour. In addition, another carbon nitride films were formed on the ferrite head used for digital-video-cassette tape recording. The anti-wearing-out function test using recording tape running with 10m/s was performed. The micro cracks were seen on all sample after 3-5 minutes running. These cracks developed with running duration. In conclusion, amorphous carbon nitride films are not still available for magnetic head coatings. Additional efforts related to controlling temperature and ion accelerating in the deposition process of the films are required in the future. The details of this research are provided on the web, http : //hts.chem.nagaokaut.acjp.

采用非晶氮化碳薄膜作为坡莫合金磁头的耐磨涂层。由于我们预期在氮化碳的初始生长过程中存在决定膜的磨损的因素，因此研究了膜的磨损特性和使用记录带运行的抗磨损功能。扫描电子显微镜显示，通过ECR等离子体CVD技术沉积15分钟的膜立即从其表面在沉积之前被抛光的基底剥离，并且保留在其上而不进行任何处理。在表面抛光程序之后，α相完全消失，β相暴露于气相。在200 ℃的衬底温度下，α相中的氮和碳的扩散系数比β相中的氮和碳的扩散系数大100倍。因此，这些结果表明，在薄膜和衬底之间的界面处的梯度成分区域使它们之间的强结合。在坡莫合金磁头上沉积厚度为100 nm的非晶氮化碳膜。然后进行了以4.76cm/s的速度运行的记录带的抗磨损功能测试。影片在一小时内被彻底销毁。此外，在用于数字视频盒式磁带记录的铁氧体磁头上形成另一氮化碳膜。使用以10 m/s运行的记录带进行抗磨损功能测试。运行3-5分钟后，在所有样品上均观察到微裂纹。这些裂纹随着运行时间的延长而发展。总之，非晶氮化碳薄膜仍然不能用于磁头涂层。未来还需要在薄膜沉积过程中控制温度和离子加速方面做出更多努力。这项研究的详细情况可在网址http：//www.example.com上查阅。//hts.chem.nagaokaut.acjp