Study on Energy Dissipation of Microcantilevers and Its applications to Information Equipment

机械振荡器在频率和振幅稳定性方面上级其他机械和电气设备。到目前为止，振荡器主要用于计时器，因为无法制造复杂的结构。近年来，随着微细加工技术的进步，新的应用如SPM探针、激光扫描仪和电机等不断涌现。在这些装置中，性能由频率和振幅稳定性决定，而频率和振幅稳定性又由振荡器的动能耗散决定。在这项研究中，理论和实验方法来评估能量损失的发展，并提出了新的应用振荡器。主要结果如下：1.利用Navier-Stokes方程的近似解，推导出了计算气流阻尼（最大动能损失因子）的简单公式.本文介绍了一种精密、简便的结构阻尼内摩擦系数测量装置。其测量精度高于10^<-6>. 3。作为微振子的一个应用，本文提出了一种振幅控制的方法来测量湿表面。当振荡器的动能大于或小于表面张力吸附能时，分别测量固体或液体的表面.作为第二个应用，阐明了用于手表的振动摩擦驱动电机的设计方法。从理论和实验上分析了碰撞损失、摩擦系数、激振频率、振幅和振型对旋转效率的影响.作为标准尺寸振荡器的应用，开发了使用机械振动作为输入能量的发生器，以及从刀具振动检测刀具磨损的诊断系统。

Mechanical oscillators are superior in frequency and amplitude stabilities to other mechanical and electrical devices. So far the oscillators have been used mainly for timers because complicated structures could not be manufactured. Recently, however, by the progress of micromachining technology, new applications such as probes for SPM, laser scanners and motors are emerging. In these devices, performance is decided by the frequency and amplitude stabilities which are decided by the kinetic energy dissipation from the oscillators. In this research, theoretical and experimental methods to evaluate energy loss are developed, and new applications of oscillators are presented. Major results are as follows :1. A simple formulas for evaluating airflow damping, the largest loss factor of the kinetic energy, is derived by using the approximate solution of the Navier-Stokes equation.2. A precise and simple apparatus for measuring structural damping coefficient of internal friction, the second largest loss factor, is developed. Its measurement accuracy is higher than 10^<-6>.3. As an application of the micro-oscillators, an amplitude control method to measure the wet surface by AFM was developed. When the kinetic energy of the oscillator is larger or smaller than the adsorption energy by the surface tension, solid or liquid surface is measured respectively.4. As the second application, a design method of the vibrational friction drive motor used for wristwatches was clarified. The effect of the collision loss, friction coefficient, exciting frequency, amplitude and the mode shape to the rotation efficiency was examined theoretically and experimentally.5. As applications of normal-sized oscillators, generators which use mechanical vibration as input energy, and a diagnosis system that detects tool wear from cutter vibration were developed.