权益分类	功能权益	普通用户	{{item.name}}会员
{{category.name}}	{{benefitItem.name}}

Study on Energy Dissipation of Microcantilevers and Its applications to Information Equipment

微悬臂梁能量耗散研究及其在信息设备中的应用

基本信息

批准号：
11450065
负责人：
HOSAKA Hiroshi
金额：
$ 4.1万
依托单位：
The University of Tokyo
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
1999
资助国家：
日本
起止时间：
1999 至 2001
项目状态：
已结题

项目摘要

Mechanical oscillators are superior in frequency and amplitude stabilities to other mechanical and electrical devices. So far the oscillators have been used mainly for timers because complicated structures could not be manufactured. Recently, however, by the progress of micromachining technology, new applications such as probes for SPM, laser scanners and motors are emerging. In these devices, performance is decided by the frequency and amplitude stabilities which are decided by the kinetic energy dissipation from the oscillators. In this research, theoretical and experimental methods to evaluate energy loss are developed, and new applications of oscillators are presented. Major results are as follows :1. A simple formulas for evaluating airflow damping, the largest loss factor of the kinetic energy, is derived by using the approximate solution of the Navier-Stokes equation.2. A precise and simple apparatus for measuring structural damping coefficient of internal friction, the second largest loss factor, is developed. Its measurement accuracy is higher than 10^<-6>.3. As an application of the micro-oscillators, an amplitude control method to measure the wet surface by AFM was developed. When the kinetic energy of the oscillator is larger or smaller than the adsorption energy by the surface tension, solid or liquid surface is measured respectively.4. As the second application, a design method of the vibrational friction drive motor used for wristwatches was clarified. The effect of the collision loss, friction coefficient, exciting frequency, amplitude and the mode shape to the rotation efficiency was examined theoretically and experimentally.5. As applications of normal-sized oscillators, generators which use mechanical vibration as input energy, and a diagnosis system that detects tool wear from cutter vibration were developed.

机械振荡器在频率和振幅稳定性方面优于其他机械和电气设备。到目前为止，振荡器主要用于计时器，因为复杂的结构无法制造。然而，近年来，随着微加工技术的进步，SPM探针、激光扫描仪和电机等新的应用正在出现。在这些器件中，性能由频率和振幅的稳定性决定，而频率和振幅的稳定性又由振荡器的动能耗散决定。在本研究中，发展了评估能量损失的理论和实验方法，并提出了振荡器的新应用。主要研究结果如下：利用Navier-Stokes方程的近似解，导出了一个计算气流阻尼（最大的动能损失因子）的简单公式。研制了一种测量结构内摩擦阻尼系数（第二大损失因子）的精密、简便的仪器。其测量精度高于10^<-6>.3。作为微振荡器的一种应用，提出了一种用原子力显微镜测量湿表面的幅度控制方法。当振荡器的动能大于或小于表面张力的吸附能时，分别测量固体或液体表面。作为第二种应用，阐明了手表用振动摩擦驱动电机的设计方法。从理论上和实验上考察了碰撞损失、摩擦系数、激振频率、幅值和振型对旋转效率的影响。作为标准尺寸振荡器的应用，开发了以机械振动为输入能量的发电机，以及由刀具振动检测刀具磨损的诊断系统。