Study on Nano-scale Measurement Technique of Thermophysical Properties Using Near-field Optics

近场光学纳米级热物性测量技术研究

• 批准号: 14350112
• 负责人: NAGASAKA Yuji
• 金额: $ 10.94万
• 依托单位: Keio University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2002
• 资助国家: 日本
• 起止时间: 2002 至 2003
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-14350112/
• 关键词: Thermal properties; Optical measurement technique; Nanotechnology; Thermal conductivity; Thermal diffusivity; Near-field optics

In order to measure nano-scale thermal properties (i.e. thermal conductivity and thermal diffusivity) of nano-materials, Near-field Optics Thermal Nanoscopy, which has a high spatial resolution beyond a diffraction limit of light, has been developed. Research results are summarized as follows;1, Adopting the PZT scanning-stage, dithering system and near-field optical system, near-field light can be stably excited in a near-field regime of sample surface.2, To check the validity of present technique, diffracted grating and 150 nm-thick Al thin film were demonstrated, and thermoreflectance signal was successfully detected by using present apparatus. The spatial resolution is estimated to be about 100 nm.3, Probe oscillation method, which can eliminate the error due to a reflection from Au coating of near-field optical fiber, was originated to detect the weak signal of reflectivity change in near-field light.4, The near-field lights that contain the information of thermal properties of 125 nm-thick Al thin film and Single-walled Carbon Nanotube were successfully detected by using probe oscillation method with 500 nm apertured near-field optical fiber. Results of phase-lag (heating laser vs. temperature change) indicate the adequacy of present study to measure thermal conductivity and thermal diffusivity of nano materials.

为了测量纳米材料的纳米尺度热性质（即热导率和热扩散率），人们开发了具有超出光衍射极限的高空间分辨率的近场光学热纳米显微镜。主要研究结果如下：1、采用PZT扫描平台、抖动系统和近场光学系统，在样品表面近场区域内实现了近场光的稳定激发; 2、采用衍射光栅和150 nm厚的Al薄膜验证了本方法的有效性，并成功地实现了热反射信号的检测。3、为了检测近场光中反射率变化的微弱信号，提出了一种可以消除近场光纤Au涂层反射误差的探针振荡法。利用近场光场技术研究了125 nm厚Al薄膜和单晶Al薄膜的热物性信息。采用500 nm孔径近场光纤探针振荡法成功探测了壁碳纳米管。相位滞后（加热激光与温度变化）的结果表明，目前的研究足以测量纳米材料的热导率和热扩散率。

项目成果

長坂 雄次: "ナノ・マイクロスケール熱物性研究の展開"第23回日本熱物性シンポジウム講演論文集. 23. 268-270 (2002)

Yuji Nagasaka：“纳米/微米尺度热物理性质研究的进展”第23届日本热物理性质研讨会论文集23. 268-270 (2002)。

長坂 雄次: "ナノ・マイクロスケール熱物性研究の展望"第23回日本熱物性シンポジウム講演論文集. 23. 268-270 (2002)

Yuji Nagasaka：“纳米和微米尺度热物理性质研究的展望”第 23 届日本热物理性质研讨会论文集 23. 268-270 (2002)。

Y.Taguchi, Y.Horiguchi, M.Kobayashi, T.Saiki, Y.Nagasaka: "Development of Nanoscale Thermal Properties Measurement Technique by Using Near-field Optics."The International Symposium on Micro-Mechanical Engineering 2003, (Tsukuba, Japan). (to be presented).

Y.Taguchi、Y.Horiguchi、M.Kobayashi、T.Saiki、Y.Nagasaka：“利用近场光学开发纳米级热性能测量技术”。2003 年国际微机械工程研讨会（日本筑波）

田口 良広: "近接場光を用いたナノスケール熱物性計測法の開発(第3報 単層カーボンナノチューブの予備的測定)"第41回日本伝熱シンポジウム講演論文集. (発表予定). (2004)

Yoshihiro Taguchi：“利用近场光的纳米级热物理性质测量方法的开发（第3部分：单壁碳纳米管的初步测量）”第41届日本传热研讨会论文集（预定发表）。

Y.Taguchi: "Development of Nanoscale Thermal Properties Measurement Technique by Using Near-field Optics"JSME Int.J.. B47(掲載予定). (2004)

Y.Taguchi：“利用近场光学开发纳米级热性能测量技术”JSME Int.J.. B47（待出版）。