High density and large area atmospheric plasma production and the industrial application by using a variable energy type barrier discharge

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New system CCMD (Capacity-Coupled Multi Discharge : Electric discharge type which replaced the dielectric with the quenching capacitor) in this study unlike the conventional dielectric barrier discharge it was devised. The atmospheric pressure glow plasma was generated, and the research-for the purpose of increase (conventional 5 times) of the input energy to the plasma, broadening the cross section and densifying of the atmospheric pressure plasma, elucidation of the discharge mechanism and clarification of the electrophysical property was carried out. As an industrial application, this plasma was used for the NOx removal, and technology improvement and practical application, application to the material surface treatment of the exhaust gas treatment by the plasma were examined. Until now result is described in the following.1)The increase of the input energy to the plasma : The input energy to the plasma increases, when the capacity of the quenching capacitor increases, and input ener … More gy is more largest than the dielectric barrier discharge, and it becomes 120 times.2)The discharge circuit design : L/R<τ<CR is a necessary condition in the circuit action, when the characteristic time of the glow-arc transition is τ, equivalent resistance of discharge circuit including the plasma is R, inductance is L, and capacitance of the quenching capacitor is C.3)Increase mechanism of the input energy : In the dielectric barrier discharge, it was verified experimentally that upper limit occurred in area effect of surface charge in energy growth.4)DC drive : The DC drive of CCMD was realized, and it succeededd in the control in the pulse interval.5)The elucidation of the discharge mechanism : The potential of the needle electrode fluctuated by the microdischarge of several decade ns, and it was verified experimentally that self quenching was realized by this potential fluctuation.6)The control of the input power to the plasma : The input energy is proportional to the ratio (especially, the integer part) of dielectric breakdown voltage, and capacity of the quenching capacitor and discharge frequency.7)The propagation velocity of the microdischarge : The propagation velocity of the microdischarge is approximately 3×10^5 m/s.8)The application to the ozone generation : Generation efficiency of the 41.5 g/kWh was obtained in the oxygen raw material, when it tried to carry out the ozone generation test by the parallel connection of 29 needle electrode. Less