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High density and large area atmospheric plasma production and the industrial application by using a variable energy type barrier discharge

变能量型势垒放电高密度大面积大气等离子体的制备及工业应用

基本信息

批准号：
14380207
负责人：
FUJIWARA Tamiya
金额：
$ 3.97万
依托单位：
Iwate University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2002
资助国家：
日本
起止时间：
2002 至 2004
项目状态：
已结题

项目摘要

New system CCMD (Capacity-Coupled Multi Discharge : Electric discharge type which replaced the dielectric with the quenching capacitor) in this study unlike the conventional dielectric barrier discharge it was devised. The atmospheric pressure glow plasma was generated, and the research-for the purpose of increase (conventional 5 times) of the input energy to the plasma, broadening the cross section and densifying of the atmospheric pressure plasma, elucidation of the discharge mechanism and clarification of the electrophysical property was carried out. As an industrial application, this plasma was used for the NOx removal, and technology improvement and practical application, application to the material surface treatment of the exhaust gas treatment by the plasma were examined. Until now result is described in the following.1)The increase of the input energy to the plasma : The input energy to the plasma increases, when the capacity of the quenching capacitor increases, and input ener … More gy is more largest than the dielectric barrier discharge, and it becomes 120 times.2)The discharge circuit design : L/R<τ<CR is a necessary condition in the circuit action, when the characteristic time of the glow-arc transition is τ, equivalent resistance of discharge circuit including the plasma is R, inductance is L, and capacitance of the quenching capacitor is C.3)Increase mechanism of the input energy : In the dielectric barrier discharge, it was verified experimentally that upper limit occurred in area effect of surface charge in energy growth.4)DC drive : The DC drive of CCMD was realized, and it succeededd in the control in the pulse interval.5)The elucidation of the discharge mechanism : The potential of the needle electrode fluctuated by the microdischarge of several decade ns, and it was verified experimentally that self quenching was realized by this potential fluctuation.6)The control of the input power to the plasma : The input energy is proportional to the ratio (especially, the integer part) of dielectric breakdown voltage, and capacity of the quenching capacitor and discharge frequency.7)The propagation velocity of the microdischarge : The propagation velocity of the microdischarge is approximately 3×10^5 m/s.8)The application to the ozone generation : Generation efficiency of the 41.5 g/kWh was obtained in the oxygen raw material, when it tried to carry out the ozone generation test by the parallel connection of 29 needle electrode. Less

与传统的介质阻挡放电不同，本研究设计了一种新系统CCMD(电容耦合多次放电：以猝灭电容代替介质的放电型)。产生了大气压辉光等离子体，并对大气压辉光等离子体的放电机理和电物理性质进行了研究，目的是提高大气压辉光等离子体的输入能量(常规5倍)，加宽大气压辉光等离子体的截面和致密化。作为工业应用，将该等离子体用于脱除NOx，并考察了工艺改进和实际应用，以及在材料表面等离子体处理废气中的应用。到目前为止，结果描述如下：1)等离子体输入能量的增加：等离子体的输入能量随着猝灭电容器容量的增加而增加，并且输入能量…放电电路设计：L/R&lt；τ&lt；当辉光-电弧转变的特征时间为τ，放电回路的等效电阻为R，电感为L，猝灭电容为3)输入能量的增加机理：在介质阻挡放电中，实验验证了表面电荷的面积效应在能量增长中出现了上限。4)直流驱动：实现了CCMD的直流驱动，并在脉冲间隔内成功控制。5)放电机理的阐明：针电极的电势在几十ns的微放电中波动，6)对等离子体的输入功率控制：输入能量与介质击穿电压、猝灭电容的容量和放电频率的比值(特别是整数部分)成正比。7)微放电的传播速度：微放电的传播速度约为3×10~(-5)m/s。8)在臭氧产生中的应用：在氧气原料中，尝试用29针电极并联进行臭氧产生试验时，获得了41.5g/kWh的产生效率。较少