New Technology of Atmospheric plasmas using capacity coupled multi discharge and their applications

本研究的目的是建立一种产生大气等离子体的新技术并探索其应用。在容量耦合多重放电（CCMD）系统中，通过改变静电电容的大小，可以很容易地控制等离子体的能量输入。该系统区别于以往的等离子体生成技术介质阻挡放电，具有明显的优越性。目前的结果描述如下。1)扩大等离子体体积产生臭氧，稳定放电：2005财政年度，为实现该方法的大截面制作，将18个针电极并联，并在针电极侧连接45 pF的淬火电容器（2.5 pF×18），尝试臭氧发展。此外，为了稳定放电，整个系统被设置在等离子体容器中。结果表明，氧的臭氧生成浓度最高可达320ppm（纯度99.5%以上），臭氧生成效率为8 g/kWh。2006财年，为了使该方法具有较大的容量，集成了20个针电极，并在针电极侧（18 pFx20）并联了360 pF的淬火电容器，并进行了臭氧生成试验。对置电极采用网状电极，整个系统在玻璃管内设置一个电极以稳定放电。结果表明，氧（纯度99.5%）的臭氧生成浓度最高可达155ppm，臭氧生成效率为19.5 g/kWh。虽然与2005财年的结果相比，臭氧产生效率有所提高，但仍需进一步优化。2)交变电压波形对臭氧产生的影响：为了在施加电压波形为连续正弦波形（10 kHz或20 kHz）时促进自由基的扩散，为了增加臭氧的产生，提高臭氧产生效率，将施加电压波形改为爆发波。虽然臭氧生成密度随占空比的降低而降低，但臭氧生成效率提高到20 g/kWh。3)网状电极在臭氧生成中的作用：在使用CCMD生成臭氧中，已经了解到使用网状电极作为对极的放电方法对提高臭氧生成效率是有效的。4)集成化CCMD的特点：证实了集成化CCMD的工作原理与以往的CCMD相似。据了解，CCMD在一体化方面的运作具有普遍性。少

The aim of this study is to establish a new technology for generation of atmospheric plasmas and to grope for their applications. In CCMD ( Capacity-Coupled Multi Discharge) system, energy input into the plasma can be easily controlled by changing the amount of electrostatic capacitance. The system is different from the past plasma generation technology dielectric barrier discharge, and it was distinguished. Current result is described as follows. 1)Enlargement of plasma volume for ozone generation, and stabilization of the discharge : In 2005 fiscal year,18 needle electrodes were connected parallel for the large cross section making about this method, and quenching capacitor of 45 pF on the needle electrode side (2.5 pF×18) was connected and the ozone development was tried. Moreover, the entire system was set up in the plasma vessel for the stabilization of the electrical discharge. As a result, the ozone generation concentration of 320ppm was obtained in the maximum by using oxygen ( … More purity 99.5%), and the ozone generation efficiency of 8 g/kWh was obtained. In 2006 fiscal year,20 needle electrodes were integrated for making of this method a large capacity, and quenching capacitor 360 pF on the needle electrode side (18 pFx20) was connected parallel and the ozone generation was tried. The mesh electrode was used for the opposing electrode, and an electrode the entire system was set up in the glass tube for the stabilization of the electrical discharge. As a result, the ozone generation concentration of 155ppm was obtained in the maximum by using oxygen (purity 99.5%), and the ozone generation efficiency of 19.5 g/kWh was obtained. Though the improvement of the ozone generation efficiency was able to be achieved compared with the result in 2005 fiscal year, further optimization is necessary. 2)Effect of waveform in ozone generation of alternating voltage : To promote the diffusion of the radical when the waveform of applied voltage is a continuous sinusoidal waveform (10 or 20 kHz), the waveform of applied voltage has been changed to the burst wave for the increase of the ozone generation and the improvement of the ozone generation efficiency. Though the ozone generation density decreases with decrease of the duty ratio, the ozone generation efficiency is improved to 20 g/kWh. 3)Effect of mesh electrode in ozone generation : In ozone generation using CCMD, it has been understood that the electrical discharge method to use the mesh electrode for the opposing electrode is effective to the improvement of ozone generation efficiency. 4)Characteristic of integrated CCMD : It is confirmed that the integrated CCMD operates by the principle of the electrical discharge similar to CCMD of the past. It has been understood that there is universality in the operation of the CCMD for integration. Less