New Technology of Atmospheric plasmas using capacity coupled multi discharge and their applications

本研究的目的是建立一种新的大气压等离子体产生技术，并对其应用进行探索。在CCMD（电容耦合多放电）系统中，通过改变静电电容的大小可以很容易地控制输入到等离子体中的能量。该系统不同于以往的介质阻挡放电等离子体发生技术，并加以区别。目前的结果如下所述。1)臭氧生成用等离子体体积的扩大、放电的稳定化：2005年度，为了制作大截面，将18根针电极并联，在针电极侧连接45 pF的猝灭电容器（2.5pF ×18），进行了臭氧生成的试验。此外，整个系统设置在等离子体容器中，用于稳定放电。结果，通过使用氧气（ ...更多信息 纯度99.5%），并且获得8 g/kWh的臭氧发生效率。在2006年度，为了使该方法成为大容量，将20个针状电极一体化，并联连接针状电极侧的猝灭电容器360 pF（18 pF × 20），尝试臭氧的产生。网状电极用于相对电极，并且整个系统的电极设置在玻璃管中以稳定放电。结果，通过使用氧气（纯度99.5%），最大获得155 ppm的臭氧产生浓度，并且获得19.5g/kWh的臭氧产生效率。虽然与2005财年的结果相比，臭氧发生效率得以提高，但仍需进一步优化。2)交流电压的臭氧发生中的波形效果：为了促进自由基的扩散，当施加电压的波形是连续的正弦波形（10或20 kHz）时，施加电压的波形已经改变为突发波，以增加臭氧的产生和提高臭氧发生效率。虽然臭氧产生密度随着占空比的减小而减小，但臭氧产生效率提高到20 g/kWh。3)臭氧发生中网状电极的效果：在使用CCMD的臭氧发生中，已经理解，将网状电极用于相对电极的放电方法对于提高臭氧发生效率是有效的。4)集成CCMD的特点：证实了集成CCMD的工作原理与过去的CCMD类似。据了解，CCMD的整合操作具有普遍性。少

The aim of this study is to establish a new technology for generation of atmospheric plasmas and to grope for their applications. In CCMD ( Capacity-Coupled Multi Discharge) system, energy input into the plasma can be easily controlled by changing the amount of electrostatic capacitance. The system is different from the past plasma generation technology dielectric barrier discharge, and it was distinguished. Current result is described as follows. 1)Enlargement of plasma volume for ozone generation, and stabilization of the discharge : In 2005 fiscal year,18 needle electrodes were connected parallel for the large cross section making about this method, and quenching capacitor of 45 pF on the needle electrode side (2.5 pF×18) was connected and the ozone development was tried. Moreover, the entire system was set up in the plasma vessel for the stabilization of the electrical discharge. As a result, the ozone generation concentration of 320ppm was obtained in the maximum by using oxygen ( … More purity 99.5%), and the ozone generation efficiency of 8 g/kWh was obtained. In 2006 fiscal year,20 needle electrodes were integrated for making of this method a large capacity, and quenching capacitor 360 pF on the needle electrode side (18 pFx20) was connected parallel and the ozone generation was tried. The mesh electrode was used for the opposing electrode, and an electrode the entire system was set up in the glass tube for the stabilization of the electrical discharge. As a result, the ozone generation concentration of 155ppm was obtained in the maximum by using oxygen (purity 99.5%), and the ozone generation efficiency of 19.5 g/kWh was obtained. Though the improvement of the ozone generation efficiency was able to be achieved compared with the result in 2005 fiscal year, further optimization is necessary. 2)Effect of waveform in ozone generation of alternating voltage : To promote the diffusion of the radical when the waveform of applied voltage is a continuous sinusoidal waveform (10 or 20 kHz), the waveform of applied voltage has been changed to the burst wave for the increase of the ozone generation and the improvement of the ozone generation efficiency. Though the ozone generation density decreases with decrease of the duty ratio, the ozone generation efficiency is improved to 20 g/kWh. 3)Effect of mesh electrode in ozone generation : In ozone generation using CCMD, it has been understood that the electrical discharge method to use the mesh electrode for the opposing electrode is effective to the improvement of ozone generation efficiency. 4)Characteristic of integrated CCMD : It is confirmed that the integrated CCMD operates by the principle of the electrical discharge similar to CCMD of the past. It has been understood that there is universality in the operation of the CCMD for integration. Less