New Technology of Atmospheric plasmas using capacity coupled multi discharge and their applications

本研究的目的是建立一种产生大气等离子体的新技术，并探索其应用。在CCMD(电容耦合多放电)系统中，通过改变静电电容的大小可以很容易地控制输入到等离子体中的能量。该系统不同于以往的等离子体发生技术--介质阻挡放电，而是区别于以往的等离子体发生技术。目前的结果描述如下。1)扩大臭氧产生等离子体体积，稳定放电：2005财年，为制作该方法的大截面，并联了18个针电极，并在针电极一侧连接了45pF的猝灭电容器(2.5pF×18)，尝试了臭氧的开发。此外，整个系统被设置在等离子体容器中，以稳定放电。结果，通过使用氧气(…)获得了最大320ppm的臭氧产生浓度纯度99.5%)，臭氧生成效率为8g/kWh。在2006财年，为了使该方法成为一种大容量的方法，集成了20个针电极，并将针电极侧(18pFx20)上的猝灭电容360pF并联，并尝试了臭氧产生。对置电极采用网状电极，整个系统在玻璃管中设置一个电极，用于稳定放电。结果表明，氧气(纯度99.5%)的臭氧生成浓度最高可达155ppm，臭氧生成效率为19.5g/kWh。与2005财年相比，臭氧生成效率虽然有所提高，但仍需进一步优化。2)交流电压波形在臭氧产生中的作用：当外加电压波形为连续正弦波(10或20 kHz)时，为了促进自由基的扩散，将外加电压波形改为猝发波，以增加臭氧生成量，提高臭氧生成效率。虽然臭氧生成密度随占空比的降低而降低，但臭氧生成效率提高到20g/kWh。3)网状电极在臭氧产生中的作用：在CCMD的臭氧产生中，人们已经认识到，用网状电极对置电极的放电法对提高臭氧产生效率是有效的。4)一体化CCMD的特点：确认一体化CCMD的工作原理与以往CCMD的放电原理类似。可以理解的是，CCMD的一体化运作具有普遍性。较少

The aim of this study is to establish a new technology for generation of atmospheric plasmas and to grope for their applications. In CCMD ( Capacity-Coupled Multi Discharge) system, energy input into the plasma can be easily controlled by changing the amount of electrostatic capacitance. The system is different from the past plasma generation technology dielectric barrier discharge, and it was distinguished. Current result is described as follows. 1)Enlargement of plasma volume for ozone generation, and stabilization of the discharge : In 2005 fiscal year,18 needle electrodes were connected parallel for the large cross section making about this method, and quenching capacitor of 45 pF on the needle electrode side (2.5 pF×18) was connected and the ozone development was tried. Moreover, the entire system was set up in the plasma vessel for the stabilization of the electrical discharge. As a result, the ozone generation concentration of 320ppm was obtained in the maximum by using oxygen ( … More purity 99.5%), and the ozone generation efficiency of 8 g/kWh was obtained. In 2006 fiscal year,20 needle electrodes were integrated for making of this method a large capacity, and quenching capacitor 360 pF on the needle electrode side (18 pFx20) was connected parallel and the ozone generation was tried. The mesh electrode was used for the opposing electrode, and an electrode the entire system was set up in the glass tube for the stabilization of the electrical discharge. As a result, the ozone generation concentration of 155ppm was obtained in the maximum by using oxygen (purity 99.5%), and the ozone generation efficiency of 19.5 g/kWh was obtained. Though the improvement of the ozone generation efficiency was able to be achieved compared with the result in 2005 fiscal year, further optimization is necessary. 2)Effect of waveform in ozone generation of alternating voltage : To promote the diffusion of the radical when the waveform of applied voltage is a continuous sinusoidal waveform (10 or 20 kHz), the waveform of applied voltage has been changed to the burst wave for the increase of the ozone generation and the improvement of the ozone generation efficiency. Though the ozone generation density decreases with decrease of the duty ratio, the ozone generation efficiency is improved to 20 g/kWh. 3)Effect of mesh electrode in ozone generation : In ozone generation using CCMD, it has been understood that the electrical discharge method to use the mesh electrode for the opposing electrode is effective to the improvement of ozone generation efficiency. 4)Characteristic of integrated CCMD : It is confirmed that the integrated CCMD operates by the principle of the electrical discharge similar to CCMD of the past. It has been understood that there is universality in the operation of the CCMD for integration. Less