Highly Adaptive and Parallel Processing Simulation of RF Plasma Production

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1.In order to investigate various phenomena in RF plasma production, we have developed an integrated simulation code PAF that describes time evolution of the plasma and the electromagnetic field with the finite element method.2.We have improved the two-dimensional wave propagation and diffusive transport modules, TASK/WF+TF. In the wave analysis, Maxwell's equation is solved as a stationary boundary-value problem with potentials, and the diffusive transport equation is solved with the full implicit method. The matrix solver using the wave front method was parallelized with the MPI library.3.The wave propagation module TASK/WF was extended to the three-dimensional configuration and the edge element method was introduced to suppress the spurious solutions and improve the accuracy. The wave excitation by various kinds of waveguides, helical antenna and coaxial antenna was studied and the results were compared with those of two-dimensional analysis.4.The two-dimensional particle simulation module TASK/PF was newly developed with the finite element method using highly adaptive triangular elements. The module now includes the effects of atomic-molecular processes, such as elastic collision, ionization, excitation and charge exchange, and was applied to the electrostatic simulation of RF plasma production.5.A new formulation of the gyrokinetic equations was derived by means of the Hamiltonian-Lie transformation. A new gyrokinetic particle simulation code was developed based on this formulation and applied to the analysis of the sheath formation in a magnetized plasma.6.The PC cluster of 32 CPUs (Intel Xeon 2.2 GHz) was assembled by this research project and highly-parallelized codes confirmed its high performance of computation.