Highly Adaptive and Parallel Processing Simulation of RF Plasma Production

射频等离子体生产的高度自适应并行处理模拟

• 批准号: 14380210
• 负责人: FUKUYAMA Atsushi
• 金额: $ 5.5万
• 依托单位: Kyoto University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2002
• 资助国家: 日本
• 起止时间: 2002 至 2004
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-14380210/
• 关键词: Plasma; RF Production; Simulation; Finite Element Method; Parallel Processing

1.In order to investigate various phenomena in RF plasma production, we have developed an integrated simulation code PAF that describes time evolution of the plasma and the electromagnetic field with the finite element method.2.We have improved the two-dimensional wave propagation and diffusive transport modules, TASK/WF+TF. In the wave analysis, Maxwell's equation is solved as a stationary boundary-value problem with potentials, and the diffusive transport equation is solved with the full implicit method. The matrix solver using the wave front method was parallelized with the MPI library.3.The wave propagation module TASK/WF was extended to the three-dimensional configuration and the edge element method was introduced to suppress the spurious solutions and improve the accuracy. The wave excitation by various kinds of waveguides, helical antenna and coaxial antenna was studied and the results were compared with those of two-dimensional analysis.4.The two-dimensional particle simulation module TASK/PF was newly developed with the finite element method using highly adaptive triangular elements. The module now includes the effects of atomic-molecular processes, such as elastic collision, ionization, excitation and charge exchange, and was applied to the electrostatic simulation of RF plasma production.5.A new formulation of the gyrokinetic equations was derived by means of the Hamiltonian-Lie transformation. A new gyrokinetic particle simulation code was developed based on this formulation and applied to the analysis of the sheath formation in a magnetized plasma.6.The PC cluster of 32 CPUs (Intel Xeon 2.2 GHz) was assembled by this research project and highly-parallelized codes confirmed its high performance of computation.

1.为了研究射频等离子体产生中的各种现象，我们开发了一个集成的模拟程序PAF，该程序用有限元方法描述了等离子体和电磁场的时间演化。2.我们改进了二维波传播和扩散输运模块，ASK/WF+TF。在波动分析中，将麦克斯韦方程作为带势的定常边值问题求解，扩散输运方程用全隐式方法求解。将波前法的矩阵求解器在MPI库中并行化。3.将波传播模块ASK/WF扩展到三维结构，引入棱边元法抑制伪解，提高计算精度。研究了各种波导、螺旋天线和同轴天线对电磁波的激励，并与二维分析结果进行了比较。4.采用自适应三角形单元的有限元方法，开发了二维粒子模拟模块ASK/PF。该模块现在包括原子-分子过程的影响，如弹性碰撞，电离，激发和电荷交换，并应用于静电模拟的RF等离子体产生。5.一个新的gyrokinetic方程推导的Hamiltonian-Lie变换的手段。在此基础上开发了一个新的回旋粒子模拟程序，并将其应用于磁化等离子体鞘层形成的分析。6.本研究项目组装了32 CPU（Intel Xeon 2.2 GHz）的PC集群，高度并行化的程序验证了其高性能的计算。

项目成果

Hybrid Simulation of RF Plasma Production Using FEM

使用 FEM 混合模拟射频等离子体产生

• 发表时间: 2005
• 期刊: Proc.of Plasma Science Symposium 2005 and the 22nd Symposium on Plasma Processing
• 作者: A.Fukuyama

Simulation of RF Plasma Production by FEM

通过 FEM 模拟射频等离子体产生

• 发表时间: 2003
• 期刊: Proc.of the 20th Symposium on Plasma Processing
• 作者: H.Kobayashi;A.Fukuyama
• 通讯作者: A.Fukuyama