Principle of Micro-Beam Sensor and Its application to Bio/Chemical Sensing

本研究旨在开发一种测量气体和液体导热系数的新方法，该方法使用悬浮在硅衬底沟槽上的微束MEMS传感器。在这种方法中，样品的导热性是通过测量传感器在样品流体中加热后处于稳态的温度来确定的。在开发了制造工艺后，通过使用长度约为10 μm的铂和金传感器比较空气和FC-72作为测试流体的结果，证明了该方法的可行性。通过外部空气流动的实验也证明了传感器的温升不依赖于流量的事实，这对传感器作为气体传感器的应用具有重要意义。

This study aimed to develop a new method for measuring thermal conductivity of gases and liquids using a micro-beam MEMS sensor that is suspended across a trench on a silicon substrate. In this method, the thermal conductivity of a sample is determined by measuring the temperature of the sensor at a steady-state after heating it in a sample fluid. After developing the fabrication process, feasibility of the method was demonstrated by comparing the results between the air and FC-72 as test fluids using platinum and gold sensors approximately 10 μm in length. The fact that the temperature rise of the sensor does not depend on the flow was also demonstrated by an experiment in an external air flow, which is important for the application of the sensor as gas sensors.