Principle of Micro-Beam Sensor and Its application to Bio/Chemical Sensing

这项研究旨在开发一种新的方法，利用悬挂在硅衬底上沟槽上的微束MEMS传感器来测量气体和液体的导热系数。在这种方法中，通过测量传感器在样品流体中加热后的稳态温度来确定样品的导热系数。在制定了制备工艺后，通过比较空气和FC-72作为测试液，使用长度约为10μm的铂和金传感器的结果，证明了该方法的可行性。传感器的温升不依赖于流量的事实也被外部气流中的实验所证实，这对于传感器作为气体传感器的应用具有重要意义。

This study aimed to develop a new method for measuring thermal conductivity of gases and liquids using a micro-beam MEMS sensor that is suspended across a trench on a silicon substrate. In this method, the thermal conductivity of a sample is determined by measuring the temperature of the sensor at a steady-state after heating it in a sample fluid. After developing the fabrication process, feasibility of the method was demonstrated by comparing the results between the air and FC-72 as test fluids using platinum and gold sensors approximately 10 μm in length. The fact that the temperature rise of the sensor does not depend on the flow was also demonstrated by an experiment in an external air flow, which is important for the application of the sensor as gas sensors.