Measurement of In-plane Thermal Conductivity of Thin Films Using a Micro-beam Sensor

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The objective of the present study was to develop a new method for measuring in-plane thermal conductivity of thin films that are commonly used in the electronic devices. In the proposed method, the temperature of an electrically heated micro-beam-type sensor, a 10 micron long free-standing platinum sensor 40 nm in thickness, is measured in a vacuum chamber. The in-plane thermal conductivity is evaluated from the difference in the temperature rise of the sensor between before and after deposition of a sample film on the top of the sensor. The present study demonstrated the feasibility of the method by measuring a 20 nm thick gold film fabricated by PVD as a sample. The measured thermal conductivity was approximately 30% of the literature value of bulk gold and increased by 7 % after annealing at 140 ºC for 2 hr.