Fabrication of multi-functional ferromagnetic ordered alloys by monoatomic layer deposition

有序合金表现出各种优异的磁性能，有望成为下一代电子材料。从磁存储技术应用的角度来看，有望开发出多功能有序合金。在本研究中，我们尝试采用单原子层沉积法制备具有高磁各向异性、高自旋极化和低磁阻尼常数的新型有序合金。成功制备了由l1_0型FePt、CoPt和Co_2MnSi组成的层叠结构和l1_0型FeNi薄膜，并对材料的各种性能进行了研究。

Ordered alloys show various excellent magnetic properties, and they are promising as materials for next-generation electronics. From a viewpoint of application to magnetic storage technology, it is expected to develop new ordered alloys with multi-functionalities. In this study, we have attempted to fabricate novel ordered alloys with a high magnetic anisotropy, a high spin-polarization, and a low magnetic damping constant by employing a monoatomic layer deposition method. A stacked structure with L1_0-type FePt, CoPt and Co_2MnSi and an L1_0-type FeNi thin films were successfully fabricated, and various properties of the materials were investigated.