Development of epitaxial growth technology on amorphous substrates and its application to magnetic thin films

非晶衬底外延生长技术进展及其在磁性薄膜中的应用

基本信息

批准号：
09555205
负责人：
TAKANASHI Koki
金额：
$ 7.81万
依托单位：
TOHOKU UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
1997
资助国家：
日本
起止时间：
1997 至 1999
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-09555205/
关键词：
amorphous substrates epitaxy magnetic thin films seed layers buffer layers metallic superlattices monatomic layer control 人口格子シ-ド層

项目摘要

The aim of this research is to develop the techniques for growing epitaxial films with crystal orientation well controlled, and to apply the techniques to the fabrication of magnetic thin films. We have tried to synthesize Fe/Au superlattices that we have investigated so far, on amorphous substrates by monatomic layer control, to compare their structural and magnetic properties with those for the superlattices grown on single crystal substrates.As a preliminary experiment, we first prepared Fe(xML)/Au(xML) superlattices (1【less than or equal】x【less than or equal】5 ; ML means monatomic layer thickness) on MgO(001) single crystal substrates. We have found from the X-ray diffraction and magnetization measurements that the layer thickness is controllable with the precision of approximately 0.1 ML for our samples. Next we prepared Fe/Au superlattices on quartz glass substrates. A 100 nm thick MgO(001) underlayer was first deposited on a quartz glass by ion beam sputtering ; then Fe seed (1 … More nm) and Au buffer (50 nm) layers were deposited by UHV e-beam evaporation. Fe/Au superlattice were grown on the buffer. By using the MgO(001) underlayer first deposited, we have succeeded in the fabrication of Fe/Au superlattice with the preferred orientation (001) normal to the film plane. However, the in-plane structure is polycrystalline ; in other words, the Fe/Au superlattices have (001) texture. In the X-ray diffraction profiles, the satellite peaks corresponding to superlattice structure are definitely observed, however, the intensities are smaller than those for the monocrystalline superlattices grown on MgO single crystal substrates. This indicates that the interface roughness for the texture superlattices is larger than that for the monocrystalline superlattices. The magnitude of Fe moment and the magnetooptical Kerr spectra show no large differences between textured and monocrystalline samples, suggesting that the interface roughness gives no strong influence on these magnetic properties. On the other hand, the perpendicular magnetic anisotropies (PMA) for the textured superlattices are lower than those for monocrystalline superlattices, suggesting that the PMA is very sensitive to the interface roughness. Less

这项研究的目的是开发具有晶体取向良好控制的外延膜的技术，并将技术应用于磁性薄膜的织物。我们试图通过单变性层的控制来综合我们到目前为止投资的FE/AU超晶格，以将它们的结构和磁性与单个晶体底物上种植的超晶格的结构和磁性进行比较。作为一个初步的实验，我们首先准备了FE（xml）/au（xml）/au（xml）/au（xml）超过或比较xml au（xml）等等（xml）等等（xml）效果（xml）。 MGO（001）单晶底物上是指单原子层的厚度。我们从X射线衍射和磁化测量值中发现，对于我们的样品，层厚度的精度约为0.1 mL。接下来，我们准备了石英玻璃基板上的Fe/au超晶格。首先，通过离子束溅射将100 nm厚的MGO（001）底层沉积在石英玻璃上；然后通过UHV电子束蒸发沉积Fe种子（1…更多NM）和AU缓冲液（50 nm）层。 FE/AU超级晶格在缓冲区上生长。通过首先使用MGO（001）的卧式（001），我们在FE/AU超晶格的制造方面取得了成功，首选方向（001）正常于膜平面。但是，面内结构是多晶体。换句话说，FE/AU超级晶格具有（001）纹理。在X射线衍射曲线中，肯定会观察到与超晶格结构相对应的卫星峰，但是，在MGO单晶体底物上生长的单晶超级晶格的强度小于那些的强度。这表明纹理超晶格的界面粗糙度大于单晶超晶格的界面粗糙度。 Fe时矩的大小和磁性峰值在纹理和单晶样品之间没有很大差异，这表明界面粗糙度对这些磁性特性没有强大的影响。另一方面，纹理超晶格的垂直磁各向异性（PMA）低于单晶超晶格的垂直磁各向异性（PMA），这表明PMA对界面粗糙度非常敏感。较少的