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Development of epitaxial growth technology on amorphous substrates and its application to magnetic thin films

非晶衬底外延生长技术进展及其在磁性薄膜中的应用

基本信息

批准号：
09555205
负责人：
TAKANASHI Koki
金额：
$ 7.81万
依托单位：
TOHOKU UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
1997
资助国家：
日本
起止时间：
1997 至 1999
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-09555205/
关键词：
amorphous substrates epitaxy magnetic thin films seed layers buffer layers metallic superlattices monatomic layer control 人口格子シ-ド層

项目摘要

The aim of this research is to develop the techniques for growing epitaxial films with crystal orientation well controlled, and to apply the techniques to the fabrication of magnetic thin films. We have tried to synthesize Fe/Au superlattices that we have investigated so far, on amorphous substrates by monatomic layer control, to compare their structural and magnetic properties with those for the superlattices grown on single crystal substrates.As a preliminary experiment, we first prepared Fe(xML)/Au(xML) superlattices (1【less than or equal】x【less than or equal】5 ; ML means monatomic layer thickness) on MgO(001) single crystal substrates. We have found from the X-ray diffraction and magnetization measurements that the layer thickness is controllable with the precision of approximately 0.1 ML for our samples. Next we prepared Fe/Au superlattices on quartz glass substrates. A 100 nm thick MgO(001) underlayer was first deposited on a quartz glass by ion beam sputtering ; then Fe seed (1 … More nm) and Au buffer (50 nm) layers were deposited by UHV e-beam evaporation. Fe/Au superlattice were grown on the buffer. By using the MgO(001) underlayer first deposited, we have succeeded in the fabrication of Fe/Au superlattice with the preferred orientation (001) normal to the film plane. However, the in-plane structure is polycrystalline ; in other words, the Fe/Au superlattices have (001) texture. In the X-ray diffraction profiles, the satellite peaks corresponding to superlattice structure are definitely observed, however, the intensities are smaller than those for the monocrystalline superlattices grown on MgO single crystal substrates. This indicates that the interface roughness for the texture superlattices is larger than that for the monocrystalline superlattices. The magnitude of Fe moment and the magnetooptical Kerr spectra show no large differences between textured and monocrystalline samples, suggesting that the interface roughness gives no strong influence on these magnetic properties. On the other hand, the perpendicular magnetic anisotropies (PMA) for the textured superlattices are lower than those for monocrystalline superlattices, suggesting that the PMA is very sensitive to the interface roughness. Less

本研究的目的是发展出可控制晶向的磊晶薄膜生长技术，并将其应用于磁性薄膜的制造。为了比较Fe/Au超晶格与单晶衬底上生长的Fe/Au超晶格的结构和磁性，我们尝试在非晶衬底上通过单原子层控制合成Fe/Au超晶格，作为初步实验，我们首先制备了Fe（xML）/Au（xML）超晶格（1[小于或等于]x[小于或等于]5 ; ML表示单原子层厚度）。我们已经发现，从X射线衍射和磁化测量的层厚度是可控的，我们的样品的精度约为0.1 ML。接下来我们在石英玻璃衬底上制备了Fe/Au超晶格。首先通过离子束溅射将100 nm厚的MgO（001）底层沉积在石英玻璃上，然后将Fe晶种（1 ...更多信息 nm）和Au缓冲层（50 nm）。在缓冲层上生长了Fe/Au超晶格。利用先淀积的MgO（001）底层，我们成功地制备了具有垂直于膜面的（001）择优取向的Fe/Au超晶格。然而，面内结构是多晶的;换句话说，Fe/Au超晶格具有（001）织构。在X射线衍射曲线中，明确观察到对应于超晶格结构的卫星峰，然而，强度小于在MgO单晶衬底上生长的单晶超晶格的强度。这表明织构超晶格的界面粗糙度大于单晶超晶格。Fe磁矩的大小和磁光克尔谱显示织构和单晶样品之间没有很大的差异，这表明界面粗糙度没有强烈的影响，这些磁性。另一方面，垂直磁各向异性（PMA）的织构超晶格低于那些单晶超晶格，这表明PMA是非常敏感的界面粗糙度。少