Development of High-Efficiently Calibrating Method of the Second Master with 3-Dimensional Curved Surface

以渐开线螺旋面为被测对象，研制了一种测量其三维曲面形状偏差的原型装置。该仪器的光学系统由激光束组成，取代了传统试验机的接触式触头。该方法测得的结果与理论曲面的误差在0.2μm以下，与传统试验机测得的结果相比，精度在一阶以上。作为一种除线形和柱面物体外的测量方法，这种测量技术目前被认为能使测量精度高于竞争对手。在这一发展过程中，主要内容如下：(1)在第一阶段，平行光束或聚焦光束照射到具有一定直径和粗糙度的圆柱体的周表面作为初步实验。当柱体沿光束方向移动时，检验了测量移动距离的可能性。从测量结果来看，该方法可以使每一种超过600的梁型和磨纸粗糙度都能以足够的精度测量位移距离。(2)用电机驱动人工代替人工处理基缸旋转，确认了测量结果的重复性。(3)考察了各种因素对测量结果的影响。（3.1）温度对实验结果影响较大。（3.2）确认检测系统从激光束照射到固定在测量仪器上的反射镜的电漂移不可忽视。（3.3）在原子力显微镜上宽量程测量齿轮齿面与基缸的实测坐标计算的尺寸与以往设计值有一定偏差。分析证实，这种微小的偏差影响了所研制仪器的测量精度。少

By choosing a involute helicoid as a object to be measured, a proto-type apparatus to measure its form deviation with 3-dimensional curved surface is developed. The optical system of the apparatus is constituted with laser beams in stead of contacting stylus of conventional testing machine. Accuracy of the result measured by this method is under 0.2μm to theoretical curved surface and is beyond one-order compared with the one by conventional testing machine. As a measuring method except for object with linear and cylindrical surface, this measuring technique is now considered to bring measuring accuracy above rivalry.In this development, the main term is as follows:(1) In the first stage, parallel beam or a focused beam is irradiated to circumferential surface of cylinder with some kinds of diameters and of roughness as a preliminary experiment. The cylinder being shifted in the direction of the beam, possibility to measure the shifting distance is checked. From the result, the measuri … More ng method makes every case of beam type and roughness finished by grinding paper over #600 measure the shifting distance with sufficient accuracy.(2) By replacing manual processing rotation of base cylinder by motor drive manual, repeatability of the measuring result is confirmed.(3) Effect of some kinds of factors on the measuring result is investigated:(3.1)Temperature influences considerably on the experimental result. Measuring environment should be considered.(3.2)It is confirmed that electric drift of detecting system from irradiation of laser beam to mirror fixed on the measuring apparatus should not be ignored. Introduction of stable electric source may be effective.(3.3)Dimension calculated from the measured coordinates of gear tooth flank and base cylinder put on atomic force microscope with wide measuring range has some deviation compared with the previous designed values. It is analytically confirmed that this little deviation effects on the accuracy measured by this developed apparatus. Less