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DEVELOPMENT OF ULTRAPRECISION ALIGNMENT TABLE BY MEANS OF WALKING DRIVE

步进驱动超精密对中工作台的开发

基本信息

批准号：
13555036
负责人：
SHAMOTO Eiji
金额：
$ 2.82万
依托单位：
NAGOYA UNIVERSITY (2002)Kobe University (2001)
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2001
资助国家：
日本
起止时间：
2001 至 2002
项目状态：
已结题

项目摘要

The objectives of this research have been successfully attained after two years of research. The major research results obtained are as follows ;1. Development of walking tableCompact ultraprecision Xyθ table is developed by applying the principle of walking drive. Since adhesives are considered to have negative effects on motion accuracy and also degree of vacuum, the driving blocks are all fabricated without using adhesives.2. Development of algorithm and software for open loop controlAn algorithm and software to drive the developed table by open loop control are developed, and the fundamental characteristics of the driving system are clarified by the driving experiments.3. Improvement of open loop motion by linear compensationA linear compensation matrix is identified to compensate the motion errors, and the open loop motion of the walking drive system is improved by utilizing the linear compensation algorithm developed here.4. Total evaluation of the developed systemThe total system developed in the present research including the walking table, driving software, control and compensation software is evaluated through precision positioning experiments, and it is confirmed that the developed system has fine positioning resolution of less than 50 nm, which is resolution of the image processing system employed to measure the position here.

经过两年的研究，这项研究的目标已经成功地达到了。获得的主要研究成果如下：1。应用行走驱动原理，研制了紧凑型超精密Xyθ工作台。由于胶粘剂被认为对运动精度和真空度有负面影响，所以驱动块都是不使用胶粘剂制造的。开发了用开环控制驱动所研制的工作台的算法和软件，并通过驱动实验阐明了驱动系统的基本特性。利用线性补偿改进开环运动通过确定线性补偿矩阵来补偿运动误差，利用本文提出的线性补偿算法改善步行驱动系统的开环运动。通过精密定位实验，对所开发的行走台、驱动软件、控制和补偿软件等整体系统进行了评价，确定所开发的系统具有小于50 nm的精细定位分辨率，该分辨率为此处测量位置所采用的图像处理系统的分辨率。

项目成果

期刊论文数量（60）

专著数量（0）

科研奖励数量（0）

会议论文数量（0）

专利数量（0）

社本英二, 植村友昭, 森脇俊道, 山内朗, 奈良場聡: "Walking Driveを用いた超精密アライメント装置の開発-変位拡大機構の適用と画像処理を利用した位置決め"2003年度精密工学会春季大会学術講演会講演論文集. (発表予定). (2003)

Eiji Shamoto、Tomoaki Uemura、Toshimichi Moriwaki、Akira Yamauchi、Satoshi Naraba：“利用行走驱动的超精密对准装置的开发-利用位移放大机构和图像处理的定位”2003年精密工程学会春季会议学术会议论文集（。预定的演示）（2003）。