DEVELOPMENT OF ULTRAPRECISION ALIGNMENT TABLE BY MEANS OF WALKING DRIVE

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The objectives of this research have been successfully attained after two years of research. The major research results obtained are as follows ;1. Development of walking tableCompact ultraprecision Xyθ table is developed by applying the principle of walking drive. Since adhesives are considered to have negative effects on motion accuracy and also degree of vacuum, the driving blocks are all fabricated without using adhesives.2. Development of algorithm and software for open loop controlAn algorithm and software to drive the developed table by open loop control are developed, and the fundamental characteristics of the driving system are clarified by the driving experiments.3. Improvement of open loop motion by linear compensationA linear compensation matrix is identified to compensate the motion errors, and the open loop motion of the walking drive system is improved by utilizing the linear compensation algorithm developed here.4. Total evaluation of the developed systemThe total system developed in the present research including the walking table, driving software, control and compensation software is evaluated through precision positioning experiments, and it is confirmed that the developed system has fine positioning resolution of less than 50 nm, which is resolution of the image processing system employed to measure the position here.