Development of Ultraprecision High Speed XYθ Table Driven by Means of Walking Drive

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The objectives of this research have been successfully attained after two years of research. The major research results obtained are as follows ;1.Development of walking table and its performanceUltraprecision XYθtable is developed by applying the principle of walking drive. Stiffness and straight motion accuracy of the developed table are measured. The device has a high stiffness of more than 38 N/μm and a good straight motion accuracy of less than 0.5μm.2.Development of algorithm and software for dual mode driveAn algorithm of dual mode drive is developed in order to improve the maximum speed of the feed system. By the developed algorithm, the table is driven by elliptical vibration, which corresponds to running motion of animals, when the positioning error is large. On the other hand, it is driven by the walking drive, which corresponds to walking motion , when the error is small. Software is developed here based on the above algorithm.3.Development of laser feedback systemA feedback feasibility of the developed feed system is verified experimentally. The experimental results show that the feed system has an excellent positioning resolution of 5 nm and a relatively high maximum speed of 24 mm/sec.