Development of ultrapretision alignment table which can be used in vacuum by means of walking drive

真空行走驱动超精密对准工作台的开发

• 批准号: 15360069
• 负责人: SHAMOTO Eiji
• 金额: $ 9.22万
• 依托单位: Nagoya University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2003
• 资助国家: 日本
• 起止时间: 2003 至 2004
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-15360069/
• 关键词: Ultraprecision alignment table; Semiconductor production equipment; Piezoelectric actuator; XYθ table; Positioning device; Vacuum; 超機密アライメント装置

The objectives of this research have been successfully attained after two years of research. The major research results obtained are as follows ;1.Development of driving blocks with displacement enlargement mechanismA new diving block is developed without utilizing glues which contaminate vacuum environment and cause undesirable creep characteristics. Displacement enlargement mechanism is employed for control simplification and high speed drive.2.Development of alignment systemA new ultraprecision alignment table and its driving software are developed by utilizing 6 driving blocks mentioned above, and it is confirmed that the table can be driven precisely in accordance with position commands.3.Compensation for nonlinear characteristics of PZT'sAn algorithm and software to compensate nonlinear characteristics, hysteresis and creep, of piezoelectric actuators are developed, and they are installed to the above mentioned alignment system.4.Development of positioning control systemA positioning control system is developed, in which precision CCD cameras and image processing units are utilized as XYθ position sensors and the table is positioned according to the intermittently measured positions.5.Total evaluation of the developed systemThe total system developed in the present research including the walking table, driving software, control and compensation software is evaluated through precision positioning experiments, and it is confirmed that the developed system has a fine positioning resolution of about 30 nm.

经过两年的研究，本研究的目标已成功实现。取得的主要研究成果如下：1.具有位移放大机构的驱动块的研制一种新的驱动块的研制，不使用污染真空环境和引起不良蠕变特性的胶水。2.对准系统的研制利用上述6个驱动模块研制了一种新型的超精密对准工作台及其驱动软件，并证实了该工作台能够按照位置指令精确驱动。3.压电陶瓷非线性特性的补偿压电致动器的滞后和蠕变，并将它们安装到上述对准系统中。4.定位控制系统的开发了一个定位控制系统，该系统利用高精度CCD摄像机和图像处理单元作为XYθ位置传感器，根据间歇测量的位置对工作台进行定位通过精密定位实验，对本研究所开发的包括行走平台、驱动软件、控制和补偿软件在内的系统进行了评价，证实所开发的系统具有约30 nm的精密定位分辨率。

项目成果

Development of 3 DOF ultrasonic vibration tool for elliptical vibration cutting of sculptured surfaces

• DOI: 10.1016/s0007-8506(07)60113-9
• 发表时间: 2005-01-01
• 期刊: CIRP ANNALS-MANUFACTURING TECHNOLOGY
• 影响因子: 4.1
• 作者: Shamoto, E;Suzuki, N;Yoshino, K
• 通讯作者: Yoshino, K

Estimation of Thermal Deformation of Machine Tool by Utilizing Available Information in CNC Unit

利用数控装置中的现有信息估计机床的热变形

• 发表时间: 2003
• 期刊: JSME Series C Vol.69, No.686
• 作者: Eiji SHAMOTO;Rei HINO;Tatsuya TOMIE;Yosuke MATSUBARA;Toshimichi MORIWAKI
• 通讯作者: Toshimichi MORIWAKI

楕円振動切削による超硬合金の延性モード加工-加工メカニズムの検討-

椭圆振动切削硬质合金的延性加工 - 加工机理检验 -

• 发表时间: 2004
• 期刊: 2004年度精密工学会秋季大会学術講演会講演論文集
• 作者: Haruo ISODA;Koichi NISHINO;鈴木教和
• 通讯作者: 鈴木教和

Development of Elliptical Vibration Cutting Machine by Utilizing Mechanical Vibrator

利用机械振动器研制椭圆振动切割机

• 发表时间: 2003
• 期刊: JSPE Vol.69, No.4
• 作者: Eiji SHAMOTO;YoungChan SONQ Hideki YOSHIDA;Norikazu SUZUKI;Toshimichi MORIWAKI;Seido KOHDA;Tetsuji YAMANISHI
• 通讯作者: Tetsuji YAMANISHI

Proposal of Oblique Type of Elliptical Vibration Cutting and Its Basic Performance

斜向式椭圆振动切割的提出及其基本性能

• 发表时间: 2003
• 期刊: JSPE Vol.69, No.7
• 作者: Eiji SHAMOTO;Young Chan SONG;Kengo SASSA;Hideki YOSHIDA;Rei HINO;Toshimichi MORIWAKI
• 通讯作者: Toshimichi MORIWAKI