Development of ultrapretision alignment table which can be used in vacuum by means of walking drive

经过两年的研究，本研究的目标已经圆满实现。主要研究成果如下：1.大排量驱动块的研制研制了一种新型的潜水块，不使用会污染真空环境和产生不良蠕变特性的胶水。利用上述6个驱动模块开发了新的超精密对准工作台及其驱动软件，证实了该工作台可以精确地按照位置指令进行驱动。3.开发了PZT‘SAN算法的非线性补偿和压电驱动器的非线性滞后和蠕变补偿软件，并将其安装在上述对准系统中。4.开发了定位控制系统，5.系统总体评价本研究开发的整个系统包括步行台、驱动软件、控制与补偿软件等，通过精密定位实验对整个系统进行了评估，确定了所开发的系统具有30 nm左右的精确定位分辨率。该系统是一种高精度θ定位系统。

The objectives of this research have been successfully attained after two years of research. The major research results obtained are as follows ;1.Development of driving blocks with displacement enlargement mechanismA new diving block is developed without utilizing glues which contaminate vacuum environment and cause undesirable creep characteristics. Displacement enlargement mechanism is employed for control simplification and high speed drive.2.Development of alignment systemA new ultraprecision alignment table and its driving software are developed by utilizing 6 driving blocks mentioned above, and it is confirmed that the table can be driven precisely in accordance with position commands.3.Compensation for nonlinear characteristics of PZT'sAn algorithm and software to compensate nonlinear characteristics, hysteresis and creep, of piezoelectric actuators are developed, and they are installed to the above mentioned alignment system.4.Development of positioning control systemA positioning control system is developed, in which precision CCD cameras and image processing units are utilized as XYθ position sensors and the table is positioned according to the intermittently measured positions.5.Total evaluation of the developed systemThe total system developed in the present research including the walking table, driving software, control and compensation software is evaluated through precision positioning experiments, and it is confirmed that the developed system has a fine positioning resolution of about 30 nm.