Developmental research for rapid and automatic appearance inspection technique of electronic and/or print circuit by using optical parallel processing

利用光学并行处理的电子和/或印刷电路快速自动外观检测技术的开发研究

• 批准号: 13555076
• 负责人: SHIMIZU Isao
• 金额: $ 8.9万
• 依托单位: Ibaraki National College of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2001
• 资助国家: 日本
• 起止时间: 2001 至 2002
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-13555076/
• 关键词: appearance inspection of print circuit; optical analogue image discrimination; diffraction pattern; multiplexed matched spatial filter; automatic hologram making; optical subtraction; laser measurement; parallel image processing; 光回析パターン

New technique for rapid and automatic appearance inspection technique of electronic and/or print circuit by using optical parallel processing has been developed, instead of conventional microscopic image method and digital image processing. Using by the optical analogue image discrimination technique, the inspection and the detection of defects in the speed of light have been realized. The optical difference and/or exclusive or processing between reference and target diffraction pattern of print circuit have been developed by the technique. Multiplexed Matched Spatial Filter (MMSF) has been made, the target diffraction pattern is projected onto the MMSF and the image has been filtered to make the inspection by the MMSF. In the back focal plane of the convex lens that is set on the optical path of objective beam, high intensity defects image can be obtained. To make the MMSF, Photo-conductor Plastic Hologram (PPH) that is processed by solvent vapor has been used. The system composed of … More CCD camera, Spatial Light Modulator (SLM) and/or Programmable Phase Modulator (PPM) has been constructed on an optical rail base. The spatial range of measurement view is approximately 900 square millimeters. In the case of transmissive object, a group of defects those are several tens of micro meters have been discriminated every 30 milliseconds in the view area. The developed technique has much greater performance, compare with conventional digital image processing technique. In the case of reflective object, the rapid and automatic inspection of small defect that is several tens micron meters was difficult without image enhancement. In the defects inspection of the case of gold coating, the defects those are several hundreds of micro meters are inspected rapidly by selecting the wave length of laser. A comparison between optical analogue processing and computer image processing had been done by the authors. As the experimental result, optical analogue processing has big advantages about image resolution and processing speed. In the case of the defects which are part missing, misoriented, wrong parts and misattachment, it is clarified that the optical analogue image discrimination technique is very effective. Less

利用光学并行处理技术代替传统的显微图像法和数字图像处理技术，发展了电子电路和印刷电路板外观快速自动检测新技术。利用光学模拟图像鉴别技术，实现了对缺陷的光速检测。利用该技术实现了印刷电路参考衍射图与目标衍射图之间的光学差异和/或异或处理。制作了多路匹配空间滤波器（MMSF），将目标衍射图样投影到MMSF上，对图像进行滤波处理，实现了检测。在物镜光路上设置凸透镜后焦面，可以获得高强度的缺陷图像。为了制作MMSF，使用了通过溶剂蒸气处理的光导体塑料全息图（PPH）。组成的系统 ...更多信息 CCD相机、空间光调制器（SLM）和/或可编程相位调制器（PPM）已被构造在光轨基座上。测量视图的空间范围约为900平方毫米。在透射物体的情况下，在观察区域中，每30毫秒就可以识别出一组几十微米的缺陷。与传统的数字图像处理技术相比，该技术具有更高的性能。在反射物体的情况下，如果不进行图像增强，很难对几十微米的微小缺陷进行快速自动检测。在镀金层缺陷检测中，通过选择激光波长，实现了对几百微米级缺陷的快速检测。作者对光学模拟处理与计算机图像处理进行了比较。实验结果表明，光学模拟处理在图像分辨率和处理速度上具有较大的优势。对于零件缺失、取向错误、零件错配和错贴等缺陷，阐明了光学模拟图像识别技术的有效性。少

项目成果

Isao SHIMIZU, Yoshisada OHASI, Hikaru AONO: "Developmental research on an optical technique for automatically measuring pollen particles of Japan cedar"21^<st> Annual Tech. Meeting on Air Cleaning and Contamination Control. 189-191 (2003)

Isao SHIMIZU、Yoshisada OHASI、Hikaru AONO：“自动测量日本柳杉花粉颗粒的光学技术的开发研究”21^<st>年度技术。

I. SHIMIZU, F. KATO, K. IKEDA, T. ISAGO and Y. OHASHI: "Developmental research on a technique for simultaneously detecting defects of printed circuit externally by an optical analogue image processing"Proc. of Optics Japan 2001. 209-210 (2001)

I. SHIMIZU、F. KATO、K. IKEDA、T. ISAGO 和 Y. OHASHI：“通过光学模拟图像处理从外部同时检测印刷电路缺陷的技术的开发研究”Proc。

I.Shimizu, K.Ikeda, F.Kato: "Technique for making hologram easily and for measuring behaviour of particles in each shape and/or size simultaneously"Proc. of Intern. Workshop on Holographic Metrology in Fluid Mechanics. Keynote5-1-Keynote5-3 (2003)

I.Shimizu、K.Ikeda、F.Kato：“轻松制作全息图并同时测量每种形状和/或尺寸的颗粒行为的技术”Proc。

下平, 清水: "レーザ光による電子基板の外観検査法の開発研究"茨城高専・H14年度卒業研究論文. (2003)

下平、清水：《利用激光进行电子基板外观检查方法的开发研究》茨城工业大学，2014年毕业论文（2003年）。

Manabu SHIMODAIRA and Isao SHIMIZU: "Developmental research on the technique for appearance inspection by using laser"Ibaraki National College of Technology, Graduation Thesis. 41 (2003)

下平学、清水功：“激光外观检查技术的开发研究”茨城工业大学毕业论文。