Developmental research on the optical system reading with super resolution exceeding the Rayleigh limit in the far field, for making optical disk high density

远场超越瑞利极限超分辨率读取光学系统开发研究，实现光盘高密度化

• 批准号: 05555106
• 负责人: SHIMIZU Isao
• 金额: $ 3.33万
• 依托单位: IBARAKI COLLEGE OF TECHNOLOGY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research (B)
• 财政年份: 1993
• 资助国家: 日本
• 起止时间: 1993 至 1994
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-05555106/
• 关键词: Super Resolution Optical Micro Scope; Phase Shifting Method; Rayleigh Limit; Optical Disk; Ultra Fine Beam Spot; Optical Information Read out in the Far Field; Pit of Optical Disk; Resolution Limit of Image; 光ディスクのピット径; 遠隔場読み出し光学系; 逆位相光スポット; 位相

In this research, the results have been obtained as follows, to develop the new technique of laser microscope being able to discriminate the small objects having size less than the irradiated wave length with super-resolution by laser beam of He-Ne (wave length 0.63 mum) , for extending the capacity of storage in optical disk and reading out the informations at high speed.1) Development of the optical system being able to irradiate the ultra fine beam spots exceeding the resolution of Rayleigh limit.The shoal of the coherent light spots having about 0.3 mum size in each diameter exceeding Rayleigh limit and about 0.53 mum space at each interval have been constructed under the conditions that the laser beam was irradiated to the optical mask consisted of the checkered phase shifting lattice coated with a transparent layr patterned to ensure that the optical phases of nearest apertures was opposite, and the diffraction beam was focussed with the object lens (aperture ratio 0.90).2) Inven … More stigation of the optical system being able to read the shape informations from the ultra fine objects exceeding size limit of resolution of Rayleigh limit in the far-field.The possibility which can read, at the far-field, the ultra fine objects having the same size as the irradiated laser spots with the exceeding the resolution of Rayleigh limit by the optical system mentioned above at (1) , has been predicted by means of the simulation based on the theory of image information, and has been confirmed by the experimental results.3) The possibility putting this technique to practical use for optical disk of high density.4) It was clarified that the techniques had the possibility putting to the practical use for simultaneously reading the informations stored in the pits of 0.3 mum in diameter aligned with the same space of 0.60mum by means of the techniques mentioned above.It was clarified in this research that the investigation of binary optical lens was needed to make small spots having the diameter less than 0.1mum under the condition that the wave length of 0.63 mum was used as the irradiated beam. Less

本研究取得了以下成果：发展了激光显微镜新技术，能够用He-Ne激光束超分辨地分辨小于照射波长的小物体（波长0.63 μ m），用于扩展光盘的存储容量和高速阅读信息。1）研制了能照射出分辨率超过瑞利极限的超精细光斑的光学系统，在激光束为1000 μ m的条件下，构造出直径约为0.3 μ m、间距约为0.53 μ m的超精细相干光斑群。2）将衍射光束照射到由涂覆有透明层的棋盘格相移晶格组成的光学掩模上，该透明层图案化以确保最近孔径的光学相位相反，并且衍射光束由物镜透镜聚焦（孔径比0.90）。 ...更多信息 能够在远场中从超过瑞利极限的分辨率的尺寸极限的超细物体读取形状信息的光学系统的设想，能够在远场中通过上述（1）中提到的光学系统以超过瑞利极限的分辨率读取具有与照射的激光光斑相同尺寸的超细物体的可能性，通过基于图像信息理论的模拟预测，实验结果证实了这种技术的可行性。3）将这种技术应用于高密度光盘的可能性。阐明了该技术具有同时阅读存储在0.3 μ m的凹坑中的信息的实际应用的可能性在本研究中阐明，需要研究二元光学透镜，以在0.63 μ m波长作为照射光束的条件下，使直径小于0.1 μ m的小光斑。少

项目成果

清水 勲: "位相シフト型超解像度レーザ顕微鏡の開発に関する研究" 日本機械学会関西支部68期総会講演論文集. No.934-1. 171-173 (1993)

Isao Shimizu：“相移超分辨率激光显微镜的开发研究”日本机械工程学会关西分会第68次大会论文集No.934-173（1993）。

Isao SHIMIZU: "Super‐resolution optical microscope using phase‐shifting Laser spots array for shape measurement of submicron particles." Proc.of Intern.Congress on Optical Particle Sizing.Vol,3. 327-331 (1993)

Isao SHIMIZU：“使用相移激光点阵列测量亚微米颗粒形状的超分辨率光学显微镜。”Proc.of Intern.Congress on Optical Particle Sizing.Vol,3 (1993)。