Development of Friction Drive System and Intelligent Linear Guide for Nanometer Positioning

纳米定位摩擦驱动系统和智能直线导轨的开发

基本信息

  • 批准号:
    15360078
  • 负责人:
  • 金额:
    $ 9.6万
  • 依托单位:
  • 依托单位国家:
    日本
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)
  • 财政年份:
    2003
  • 资助国家:
    日本
  • 起止时间:
    2003 至 2004
  • 项目状态:
    已结题

项目摘要

A high precise of the order of nanometer and high speed positioning must be necessary in order to achieve a high accuracy and high throughput productivity for the next generation of LSI (large scale integrated circuit). The purpose of this research was establishment of a friction drive system with ultrasonic motor for nanometer positioning to reply these requirements. As a result of this investigation, new monitoring method was established to predict and to control wear mode of the ultrasonic motor. Further new technology was introduced to control wear particles which affect position accuracy degradation of the precise positioning stage. The conclusions obtained in this investigation are described as follows ;1.The amount of fluctuation of operating voltage Ef was proposed as a monitoring parameter of severity of contact between drive tip and driven rail. It was clarified that the transition between mild wear and severe wear could be predicted by using Ef values.2.It was clarified both experimentally and theoretically that electrostatic force accounts for most part of the total adhesive force of wear particles at the contact interface. In the case of Al_2O_3 tip, electrostatic force applied to wear particles of the order of 1 μm is 505 times larger than van der Waals force.3.Position accuracy was kept stable and by using Al_2O_3 base composite as tip material of the ultrasonic motor and air blow with electric discharge in to the friction interface. The life of the stage was increases as much as 530 times, compared with the stage life without wear particle removal and by using Al_2O_3 tip.
为了实现下一代大规模集成电路(LSI)的高精度和高吞吐量生产率,必须具有纳米级的高精度和高速定位。为了满足这些需求,本研究的目的是建立一种用于纳米定位的超声电机摩擦驱动系统。在此基础上,建立了一种新的监测方法来预测和控制超声电机的磨损模式。在精密定位阶段,引入了新的技术来控制影响定位精度下降的磨损颗粒。本次调查得出的结论如下:1。提出了工作电压波动量Ef作为驱动端与从动轨接触程度的监测参数。阐明了利用Ef值可以预测轻度磨损和重度磨损之间的过渡。实验和理论都表明,在接触界面处,静电力占磨损颗粒总粘附力的大部分。对于Al_2O_3针尖,施加在1 μm量级磨损颗粒上的静电力比施加在范德华力上的静电力大505倍。采用Al_2O_3基复合材料作为超声电机的尖端材料,并在摩擦界面内进行放电吹气,以保持定位精度稳定。与不去除磨损颗粒和使用Al_2O_3针尖的阶段相比,阶段的寿命提高了530倍。

项目成果

期刊论文数量(10)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
Tribologically-based Design of Precise Positioning Stage
基于摩擦学的精密定位台设计
Wear mode control of drive tip of ultrasonic motor for precision positioning
  • DOI:
    10.1016/s0043-1648(03)00371-5
  • 发表时间:
    2004
  • 期刊:
  • 影响因子:
    5
  • 作者:
    Takeshi Yamaguchi;K. Adachi;Y. Ishimine;K. Katô
  • 通讯作者:
    Takeshi Yamaguchi;K. Adachi;Y. Ishimine;K. Katô
K.Adachi, T.Yamaguchi, Y.Ishimine, K.Kato: "Tribologically-based Design of Precise Positioning Stage"Tribology Series, Tribological Research and Design for Engineering Systems. 41. 461-468 (2003)
K.Adachi、T.Yamaguchi、Y.Ishimine、K.Kato:“基于摩擦学的精密定位台设计”摩擦学系列,工程系统的摩擦学研究与设计。
  • DOI:
  • 发表时间:
  • 期刊:
  • 影响因子:
    0
  • 作者:
  • 通讯作者:
T.Yamaguchi, K.Adachi, Y.Ishimine, K.Kato: "Wear Mode Control of Drive Tip of Ultrasonic Motor for Precision Positioning"Wear. 256. 145-162 (2004)
T.Yamaguchi、K.Adachi、Y.Ishimine、K.Kato:“用于精确定位的超声波电机驱动尖端的磨损模式控制”磨损。
  • DOI:
  • 发表时间:
  • 期刊:
  • 影响因子:
    0
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ADACHI Koshi其他文献

ADACHI Koshi的其他文献

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{{ truncateString('ADACHI Koshi', 18)}}的其他基金

Super-low Friction Mechanisms of Tribo-coating Films and its Application to Space Mechanisms
摩擦涂层膜超低摩擦机构及其在空间机构中的应用
  • 批准号:
    20360072
  • 财政年份:
    2008
  • 资助金额:
    $ 9.6万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)
Analysis of super-low friction mechanisms of carbon nitride in nitrogen gas lubrication and development of low frictiioon tribo-system
氮化碳氮气润滑超低摩擦机理分析及低摩擦摩擦系统开发
  • 批准号:
    18360075
  • 财政年份:
    2006
  • 资助金额:
    $ 9.6万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)

相似海外基金

Development of a Friction Drive Inclined Platform Lift
摩擦驱动倾斜平台升降机的研制
  • 批准号:
    6690099
  • 财政年份:
    2003
  • 资助金额:
    $ 9.6万
  • 项目类别:
An ultraprecision positioning system using twist-roller friction drive
采用扭转滚子摩擦驱动的超精密定位系统
  • 批准号:
    13650252
  • 财政年份:
    2001
  • 资助金额:
    $ 9.6万
  • 项目类别:
    Grant-in-Aid for Scientific Research (C)
Development of Friction Drive Screw with Adjustable Lead Angle Mechanism
可调导程角机构摩擦传动丝杠的研制
  • 批准号:
    11650158
  • 财政年份:
    1999
  • 资助金额:
    $ 9.6万
  • 项目类别:
    Grant-in-Aid for Scientific Research (C)
Micro-machining using ultraprecision machine tool with twist-roller friction drive
使用带有扭转滚子摩擦驱动的超精密机床进行微加工
  • 批准号:
    10555042
  • 财政年份:
    1998
  • 资助金额:
    $ 9.6万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B).
Ultra-high Speed and Ultra-precision Positioning by Friction Drive
摩擦驱动超高速超精密定位
  • 批准号:
    04402027
  • 财政年份:
    1992
  • 资助金额:
    $ 9.6万
  • 项目类别:
    Grant-in-Aid for General Scientific Research (A)
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