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Ultra-high Speed and Ultra-precision Positioning by Friction Drive

摩擦驱动超高速超精密定位

基本信息

批准号：
04402027
负责人：
OTSUKA Jiro
金额：
$ 10.56万
依托单位：
Shizuoka Institute of Science and Technology (1993)Tokyo Institute of Technology (1992)
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (A)
财政年份：
1992
资助国家：
日本
起止时间：
1992 至 1993
项目状态：
已结题

项目摘要

The positioning apparatus is made which consists of the DC servometer, the drive wheel, the slider moved longitudinally by the friction force between the drive wheel and a slider, the table, its displacement measuring apparatus by laser and the controller. The following results can be obtained ;1. For 1mum step responses repeated 100 times by PI control, the mean of the positioning errors E at 0.5 s after the table start, e.is -1.7nm, and their standard deviation, sigma, is 3.2 nm.2. For 300 mm step responses, the modified velocity control is applied at the large displacement difference DELTAx between the target position x and table position y (DELTAx=x-y). Afterwards, at the small displacement of DELTAx, the table displacement feed-back control is applied. As a result of 100 times positioning trials, e=0.016 mum and sigma=0.17 mum at 2 s after the table start. The setting time, when the table comes into (〕SY.+-.〔)1 mum from the target position, is Ts=1.26s(mean).3. There is a nonlinear elastic relationship between the small torque of the motor, T, and resultant small table displacement, y. Furthermore, for much smaller torque and table displacement, its relationship shows a better linearity, and plays an important role for obtaining nm positioning accuracy.4. In comparison with the apparatus by the leadscrew drive, the driving force is larger for the apparatus by the friction drive. The noise and vibration during operation can not be measured.5. This friction drive is applied to the driving system for the newly-developed nm surface grinder.

该定位装置由直流伺服电机、驱动轮、滑块、工作台、激光位移测量装置和控制器组成。可以得到以下结果：1。对于通过PI控制重复100次的1 μ m阶跃响应，工作台启动后0.5 s时的定位误差E的平均值e.is-1.7 nm，其标准差σ为3.2 nm。对于300 mm阶跃响应，在目标位置x和工作台位置y之间的大位移差Δ x（Δ x =x-y）处应用修改的速度控制。之后，在Δ x的小位移处，应用工作台位移反馈控制。作为100次定位试验的结果，在工作台启动后2秒，e=0.016 μ m，σ =0.17 μ m。表进入（）SY.+-时的设定时间。()1距离目标位置的μ m为Ts=1.26s（平均值）。在电动机的小转矩T和由此产生的小工作台位移y之间存在非线性弹性关系。并且，在较小的扭矩和工作台位移下，其关系呈现出较好的线性，对获得nm的定位精度起着重要作用.与丝杠传动装置相比，摩擦传动装置的驱动力更大。运行中的噪声和振动无法测量。该摩擦传动已应用于新研制的纳米平面磨床的传动系统中。