Micro-machining using ultraprecision machine tool with twist-roller friction drive

使用带有扭转滚子摩擦驱动的超精密机床进行微加工

• 批准号: 10555042
• 负责人: MIZUMOTO Hiroshi
• 金额: $ 7.68万
• 依托单位: Tottori University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B).
• 财政年份: 1998
• 资助国家: 日本
• 起止时间: 1998 至 2000
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-10555042/
• 关键词: Aerostatic guideway; Friction drive; Machine tool; Mechatronics; Metal cutting; Nanotechnology; Positioning; Single-point diamond turning; 精密機械; 超精密工作機械; 能動制御

An ultraprecision machine tool with the twist-roller friction drive is developed for improving the precision metal cutting technology, especially the micro-machining technology used for manufacturing optical parts and micro mechanism. The twist-roller friction drive is a kind of positioning mechanism, and was invented by the head investigator for realizing Angstrom positioning resolution. The twist-roller friction drive is advantageous for ultraprecision positioning, however, this mechanism causes some lateral force which influences the straightness of motion of the positioning table. The active inherent restrictor incorporated into the aerostatic guideway can decrease the influence and improve the straightness. The ultraprecision machine tool with the twist-roller friction drive and the active inherent restrictor has three axes that are numerically controlled, and has the ability of tuming and milling.In the experiment of turning, a single-point diamond tool is mounted on the vertical … More Y-table on the horizontal Z-axis and an aluminum alloy is mounted on the air-bearing spindle on the horizontal X-table. By turning, flat and spherical mirrors are manufactured, and micro steps in the order of nanometer are made on the mirror surface. Accuracy of machined parts is in the order of 0.1μm, and surface roughness is in the order of 10nm. In the experiment of milling, a small diameter of ball endmil is mounted on the air-bearing spindle and the aluminum alloy is mounted on the Y-table. By milling, small cones and pyramids whose height are 0.1mm are manufactured. Their accuracy is about 10μm and surface roughness is in the order of several microns. Small letters and gear are also manufactured in the same accuracy shown above.These experiments show that the ultraprecision machine tool with the twist-roller friction drive can be used in practice. Therefore, the result of this research can contribute the development of the ultraprecision positioning and the micro-machining technologies. Less

为提高精密金属切削技术，特别是用于光学零件和微机械制造的微细加工技术，研制了一种扭辊摩擦传动超精密机床。扭辊摩擦传动是一种定位机构，是本课题组为实现埃级定位分辨率而发明的。扭辊摩擦传动有利于超精密定位，但该机构产生一定的侧向力，影响定位台运动的直线度。在气浮导轨中加入主动固有限流器，可以减小其影响，提高直线度。扭辊摩擦传动和主动式内节流器的超精密机床具有三轴数控、车削和铣削的能力，在车削实验中，将单刃金刚石刀具安装在垂直轴上， ...更多信息 Y工作台位于水平Z轴上，铝合金安装在水平X工作台上的空气轴承主轴上。通过车削加工，可以加工出平面镜和球面镜，并在镜面上加工出纳米级的微台阶。加工零件的精度为0.1μm量级，表面粗糙度为10nm量级。在铣削实验中，将小直径的球头立铣刀安装在气浮主轴上，铝合金工件安装在Y型工作台上。通过铣削加工，可以加工出高度为0.1mm的小锥体和棱锥体。其精度约为10μm，表面粗糙度为几微米量级。这些试验表明，扭辊摩擦传动的超精密机床是可行的。因此，本文的研究成果对超精密定位和微细加工技术的发展具有一定的参考价值。少

项目成果

Mizumoto, H., Inoue, M., Arii, S., Kami, Y.and Yabuya, M.: "An Ultraprecision Machine Tool using Twist-roller Friction Drives and Active Control Aerostatic Guideways"Proceedings of the 1st International euspen Conference. Vol.1. 28-31 (1999)

Mizumoto, H.、Inoue, M.、Arii, S.、Kami, Y. 和 Yabuya, M.：“使用扭转滚子摩擦驱动和主动控制空气静压导轨的超精密机床”第一届国际 euspen 会议论文集。

Mizumoto,H.,Inoue,S.,Arii,S.,Kami,Y.and Yabuya,M.: "An Ultraprecision Machine Tool using Twist-roller Friction Drives and Active Control Aerostatic Guideways,"Proceedings of the 1st International euspen Conference,. Vol.1. 28-31 (1999)

Mizumoto,H.、Inoue,S.、Arii,S.、Kami,Y. 和 Yabuya,M.：“使用扭转滚子摩擦驱动和主动控制空气静压导轨的超精密机床”，第一届国际 euspen 会议论文集

Mizumoto,H.,Arii,S.,Inoue,S.and Yabuya,M.: "A Performance Evaluation of the Ultraprecision Machine Tool using Twist-roller Friction Drive Mechanism"Proceedings of the 1st euspen Topical Conference on Fabrication and Metrology in Nanotechnology,. Vol.2. 46

Mizumoto,H.,Arii,S.,Inoue,S.和Yabuya,M.：“使用扭转滚子摩擦驱动机构的超精密机床的性能评估”第一届euspen纳米技术制造和计量专题会议论文集

Mizumoto,H.,Inoue,S.,Arii,S.,Kami,Y.and Yabuya,M.: "An Ultraprecision Machine Tool with Active Control Aerostatic Guidewaya for Improving Quality of Machined Surface,"Proceedings of the 9th International Conference on Production Engineering. Vol.1. 165-17

Mizumoto,H.、Inoue,S.、Arii,S.、Kami,Y.和Yabuya,M.：“一种具有主动控制空气静压导轨的超精密机床，可提高加工表面的质量”，第九届国际机械加工会议论文集

Mizumoto, H., Arii, S., Inoue, S.and Yabuya, M.: "A Performance Evaluation of the Ultraprecision Machine Tool using Twist-roller Friction Drive Mechanism"Proceedings of the 1st euspen Topical Conference on Fabrication and Metrology in Nanotechnology. Vol.

Mizumoto, H.、Arii, S.、Inoue, S.和 Yabuya, M.：“使用扭转滚子摩擦驱动机构的超精密机床的性能评估”第一届 euspen 纳米技术制造和计量专题会议论文集