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Development of integrated optic pressure sensors with high sensitivity and high withstanding pressure for tsunami detection

开发用于海啸检测的高灵敏度、高耐压集成光学压力传感器

基本信息

批准号：
15360186
负责人：
OHKAWA Masashi
金额：
$ 3.84万
依托单位：
Niigata University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2003
资助国家：
日本
起止时间：
2003 至 2004
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-15360186/
关键词：
Pressure sensor Integrated optics Glass waveguide Diaphragm 光導波路高耐圧高感度津波検出

项目摘要

The proposed sensor is based on a conventional integrated optic pressure sensor using intermodal interference, with an added semi-closed space with a small hole under the bottom side of the diaphragm. By the addition of this semi-closed space, the sensor, unlike conventional sensors, can withstand high static pressure. When there is a sudden change in ambient pressure, pressure within the semi-closed space cannot quickly adjust due to the small hole that restricts fluid flow. So, pressure difference is induced on the diaphragm for a short while. Thus, the sensor shows a response only to changes in pressure, not to static pressure.In the first year of this research project, we examined the step response of the sensor, that is, the output characteristics for sudden pressure change. The diaphragm dimensions of the fabricated sensor were 14mm×14mm×0.22mm, and the volume of the semi-closed space was 14mm×14mm×1.8mm. The sectional area of a small rectangular hole was 93μm×25μm. In this exper … More iment, the pressure in a 30cm×28cm×30cm closed box, in which the fabricated sensor was placed, was suddenly increased by 0.78 kPa. Due to the pressure change, the output intensity decreased by approximately 20% of the initial intensity level. Approximately 1.4 sec after the step-like change in pressure, output intensity returned to the initial level.In the second year, it was found from the theoretical analysis that the duration of the induced pressure difference is proportional to the V/A ratio between the volume of the semi-closed space and the sectional area of the small hole, and proportional to the square root of the initial pressure difference. So, the relationship between the duration and the sectional area of the small hole was examined experimentally. The radii of the circular holes were 20μm,25μm, and 40μm. The measured duration of the induced pressure difference was approximately 2 sec when the ambient pressure was suddenly changed by 0.7 kPa, although the duration must be dependent on the hole radius according to the theoretical results. It is attributed to pressure leak from the closed box in which the sensor was placed. Less

所提出的传感器是基于传统的集成光学压力传感器，使用模态间干涉，与一个额外的半封闭空间与一个小孔下的底部侧的膜片。通过增加这种半封闭空间，传感器与传统传感器不同，可以承受高静压。当环境压力突然变化时，由于限制流体流动的小孔，半封闭空间内的压力不能快速调节。因此，短时间内在膜片上产生压差。因此，该传感器仅对压力变化有响应，对静压没有响应。在本研究项目的第一年，我们对传感器的阶跃响应进行了研究，即对压力突然变化的输出特性进行了研究。制作的传感器膜片尺寸为14 mm × 14 mm ×0.22mm，半封闭空间体积为14 mm × 14 mm ×1.8mm。矩形小孔的截面积为93μm×25μm。在这个实验中， ...更多信息 1998年，在一个30 cm × 28 cm × 30 cm的密闭箱中，压力突然增加了0.78kPa。由于压力变化，输出强度降低了初始强度水平的约20%。第二年，通过理论分析发现，诱导压差持续时间与半封闭空间容积与小孔截面积的V/A比成正比，与初始压差的平方根成正比。因此，持续时间和小孔的截面积之间的关系进行了实验研究。圆孔的半径为20μm、25μm和40μm。当环境压力突然改变0.7 kPa时，测量的诱导压差持续时间约为2秒，尽管根据理论结果，持续时间必须取决于孔半径。这是由于放置传感器的封闭箱的压力泄漏。少

项目成果

期刊论文数量（30）

专著数量（0）

科研奖励数量（0）

会议论文数量（0）

专利数量（0）

Development of an integrated optic pressure sensor incorporated into a small plastic tube in place of a catheter

开发集成光学压力传感器，将其集成到小塑料管中代替导管

DOI：
发表时间：
2003
期刊：
2003 Convention Record, The Shin-Etsu Chapter of the Institute of Electronics, Information and Communication Engineers
影响因子：
0
作者：
K.Aizawa;S.Kawasaki;D.Tancharoen;T.Yamasaki;K.Furuya et al.;S.Dokko
通讯作者：
S.Dokko

Guided-wave optical pressure sensor with sensitivity for step-like pressure change

具有阶梯式压力变化灵敏度的导波光学压力传感器

DOI：
发表时间：
2004
期刊：
2004 Convention Record, The Shin-Etsu Chapter of the Institute of Electronics, Information and Communication Engineers
影响因子：
0
作者：
市川和典;P.Punchaipetch;矢野裕司;畑山智亮;浦岡行治;冬木隆;高橋英治;林司;Y.Endo
通讯作者：
Y.Endo

リモートセンシング用光集積回路圧力センサに関する基礎研究

遥感光学集成电路压力传感器基础研究