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Film precursors and growth mechanisms of carbon and silicon carbide deposition from gas phase

气相沉积碳和碳化硅的薄膜前驱体和生长机制

基本信息

批准号：
15360421
负责人：
KAWASE Motoaki
金额：
$ 9.79万
依托单位：
KYOTO UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2003
资助国家：
日本
起止时间：
2003 至 2004
项目状态：
已结题

项目摘要

Chemical vapor deposition of pyrolytic carbon was carried out by using a thin tubular CVD reactor at 1010℃ and 50 Torr. In order to investigate the effects of various hydrocarbons formed by complex reactions in the gas phase, deposition experiments from methane, ethane, ethylene, acetylene, propane, propylene, allene, allylene, n-butane, benzene, etc. were conducted. Pyrolytic carbon samples were obtained and the product gas composition was analyzed by micro gas chromatograph. XPS measurement of the sample prepared from propane showed that the sp^3 C-C bond fraction was ca. 70% and few sp^2 C-C bonds were detected. The sample prepared from propylene had a sp^3 fraction of 30%. The sample from allene had a sp^3 fraction of 15%. X-ray diffraction and Raman scattering measurements showed each sample seemed non-crystalline. However, a layered structure was observed by TEM in the pyrolytic carbon samples prepared from benzene, allene, and allylene. The product gas analysis showed the allene … More and allylene fraction in the gas phase was able to reach ca. 5% even when propane was fed to the reactor. The origin of the sp^2 structure observed in the film prepared from propane was thought to be allene and allylene formed in the gas phase. Film precursors in the gas phase seem to determine the structure of the resulting film. Numerical simulation of the gas phase reactions was also carried out by using an elementary reaction database. A procedure to reduce a reaction model consisting of hundreds of elementary reactions to a chemical reaction engineering model that can be used for design purpose was proposed. In the proposed procedure, elementary reactions were first screened by comparing the reaction rates for an actual gas composition, and then the model reduction was made from chemical reaction engineering point of view. From the results of the numerical simulation and gas composition analysis in the experiments, 26 important reactions were extracted from 651 elementary reactions concerning propane pyrolysis. The derived reduced model and the experimental results correlated well. Less

采用薄管式CVD反应器在1010℃、50 Torr下进行热解碳化学气相沉积。为了研究气相中复杂反应形成的各种烃的影响，进行了甲烷、乙烷、乙烯、乙炔、丙烷、丙烯、丙二烯、丙二烯、正丁烷、苯等的沉积实验。获得热解碳样品并通过微型气相色谱仪分析产物气体成分。由丙烷制备的样品的 XPS 测量表明 sp^3 C-C 键分数约为 100%。检测到 70% 和少量 sp^2 C-C 键。由丙烯制备的样品的 sp^3 分数为 30%。来自丙二烯的样品的 sp^3 分数为 15%。 X 射线衍射和拉曼散射测量显示每个样品似乎都是非晶态的。然而，通过 TEM 在由苯、丙二烯和丙二烯制备的热解碳样品中观察到层状结构。产物气体分析显示气相中的丙二烯和丙二烯分数能够达到约。即使当丙烷被供给到反应器时也是5%。在由丙烷制备的薄膜中观察到的sp^2结构的起源被认为是在气相中形成的丙二烯和丙二烯。气相中的薄膜前驱体似乎决定了所得薄膜的结构。还利用元素反应数据库对气相反应进行了数值模拟。提出了一种将由数百个基本反应组成的反应模型简化为可用于设计目的的化学反应工程模型的方法。在所提出的程序中，首先通过比较实际气体成分的反应速率来筛选基元反应，然后从化学反应工程的角度进行模型简化。根据实验中的数值模拟和气体成分分析结果，从丙烷热解的651个基元反应中提取出26个重要反应。推导的简化模型与实验结果相关性良好。较少的