Development of software gauge and material measure with large area to standardize analytic tools for surface topography data

对于当今的工业产品，表面纹理已成为影响其表面质量和功能性能的重要因素。轮廓法由于缺乏空间自由度，难以准确地评价表面纹理。然后需要对表面纹理进行面积测量和评价。因此，需要使用三维表面形貌测量仪器。ISO技术委员会目前正在讨论面状表面纹理的评估程序和校准方法。并提出了仪器标定的具体措施作为标定标准。然而，草案中没有包括由不规则微观几何组成的三维粗糙度标准。这类测量标准本质上是用来确定仪器的具体测量特性。为了验证计算表面纹理参数的软件程序，开发了基于非因果二维自回归模型的随机表面形貌数据软件。用同样的方法得到数控加工数据。以小直径球立铣刀机械加工为前提。通过了解刀具直径和刀尖几何形状，引入最小波长和最小振幅，并对表面粗糙度标准进行几何模拟。刀具几何形状用显微镜光学测量。结果表明，仿真结果与刀具几何形状直接相关。设计并制造了精密铣床。然后利用生成的数控数据进行材料测量。在表面纹理参数方面，将触控仪测量结果与模拟结果进行了比较。根据准备好的数据，确认材料尺寸是否可以加工。除了实验构造的机床外，还利用市场上的超精密机床来制造材料尺寸。通过实测结果与仿真结果的比较，研究了人造材料测量的有效性。在使用触控笔的情况下，这两个结果非常接近。但激光显微镜、光学笔、白光干涉仪等光学仪器的测量结果与模拟结果不同。地形扫描电镜也很相似。由于本研究中材料测量确实是由理论上生成的NC数据进行的，因此可以得出结论，开发的制造系统以及材料测量本身对于校准市场上的表面形貌仪器具有实际意义。少

As to the industrial products nowadays, surface texture has become much more important factor to affect their surface quality and functional performances. It is difficult to properly evaluate the surface texture by the profile method due to shortage of dimensional freedom. Then areal measurement and evaluation of the surface texture has been required. For this reason, 3-D surface topography measurement instruments are to be used. Assessment procedures for areal surface texture and calibration method are now under discussion in the technical committee of ISO. And some material measures for calibration of the instruments are proposed as the areal calibration standards. However, 3-D roughness standard composed of irregular micro geometry is not included in the draft. Such kinds of measurement standards are essentially used to identify the specific measurement characteristics of the instruments.In order to verify the software programs for calculating surface texture parameters, a software … More gauge with random surface topography data based on a non-causal 2-dimensional autoregressive model was developed. The NC machining data was produced by the same method.It was premised that the material measures is mechanically made by ball end-mill with small diameter. Minimum wavelength and amplitude was introduced by knowing the cutter diameter and tip geometry, and surface roughness standard was geometrically simulated. The cutter geometry was optically measured using a microscope. It was revealed that the simulation results were directly linked to the cutter geometry.An accurate milling machine was designed and constructed. Then the material measures were manufactured with the generated NC data. Measured results by a stylus instrument were compared with the simulation results in terms of surface texture parameters. Confirmation was made whether the material measure could be machined by following the prepared data. In addition to the experimentally constructed machine, an ultra-precision machine on the market was utilized to manufacture the material measures.Validity of the manufactured material measures was studied by comparing the measured results with the simulation results. In the case of a stylus instrument, both results were close to each other. But optical instruments such as laser microscope, optical stylus and white light interferometer produced different measured results from the simulation result. Topography SEM is also alike. Since the material measure is truly made by the theoretically generated NC data in this study, it may be concluded that the developed manufacturing system as well as the material measure itself are practically useful for calibrating the surface topography instruments on the market. Less