Development of software gauge and material measure with large area to standardize analytic tools for surface topography data

对于现代工业产品来说，表面织构已成为影响其表面质量和功能性能的重要因素。轮廓法由于缺乏尺度自由度，难以准确评价表面纹理。因此，需要对表面纹理进行区域测量和评价。为此，应使用三维表面形貌测量仪器。ISO技术委员会正在讨论面状表面结构的评定程序和标定方法。并提出了一些具体的仪器校准措施，作为区域校准标准。然而，由不规则的微观几何组成的三维粗糙度标准没有被包括在草案中。为了验证表面结构参数计算软件程序的正确性，设计了一个表面结构参数计算软件，并对该软件进行了实验验证。 ...更多信息 基于非因果二维自回归模型，开发了具有随机表面形貌数据的量规。用同样的方法生成数控加工数据，证明材料尺寸是用小直径球头立铣刀机械加工的。通过已知刀具直径和刀尖几何形状，引入最小波长和最小振幅，对表面粗糙度标准进行几何模拟。使用显微镜光学测量切割器几何形状。结果表明，仿真结果与刀具几何形状直接相关。然后利用生成的NC数据加工出材料尺寸。通过触针式测量仪测量的表面纹理参数与模拟结果进行了比较。确认是否可以按照准备好的数据加工材料尺寸。除了实验构建的机器外，还利用市场上的超精密机器来制造材料措施。通过将测量结果与模拟结果进行比较，研究了制造的材料措施的有效性。在针式仪器的情况下，两个结果彼此接近。但激光显微镜、光针、白色光干涉仪等光学仪器的测量结果与模拟结果有较大差异。扫描电镜也是如此。由于材料测量是真正的理论生成的数控数据在这项研究中，它可以得出结论，开发的制造系统以及材料测量本身是实际上有用的校准市场上的表面形貌仪器。少

As to the industrial products nowadays, surface texture has become much more important factor to affect their surface quality and functional performances. It is difficult to properly evaluate the surface texture by the profile method due to shortage of dimensional freedom. Then areal measurement and evaluation of the surface texture has been required. For this reason, 3-D surface topography measurement instruments are to be used. Assessment procedures for areal surface texture and calibration method are now under discussion in the technical committee of ISO. And some material measures for calibration of the instruments are proposed as the areal calibration standards. However, 3-D roughness standard composed of irregular micro geometry is not included in the draft. Such kinds of measurement standards are essentially used to identify the specific measurement characteristics of the instruments.In order to verify the software programs for calculating surface texture parameters, a software … More gauge with random surface topography data based on a non-causal 2-dimensional autoregressive model was developed. The NC machining data was produced by the same method.It was premised that the material measures is mechanically made by ball end-mill with small diameter. Minimum wavelength and amplitude was introduced by knowing the cutter diameter and tip geometry, and surface roughness standard was geometrically simulated. The cutter geometry was optically measured using a microscope. It was revealed that the simulation results were directly linked to the cutter geometry.An accurate milling machine was designed and constructed. Then the material measures were manufactured with the generated NC data. Measured results by a stylus instrument were compared with the simulation results in terms of surface texture parameters. Confirmation was made whether the material measure could be machined by following the prepared data. In addition to the experimentally constructed machine, an ultra-precision machine on the market was utilized to manufacture the material measures.Validity of the manufactured material measures was studied by comparing the measured results with the simulation results. In the case of a stylus instrument, both results were close to each other. But optical instruments such as laser microscope, optical stylus and white light interferometer produced different measured results from the simulation result. Topography SEM is also alike. Since the material measure is truly made by the theoretically generated NC data in this study, it may be concluded that the developed manufacturing system as well as the material measure itself are practically useful for calibrating the surface topography instruments on the market. Less