Manufacture of calibration and measurement surface standards for areal surface texture measuring instruments and their international standardization

面状表面纹理测量仪器校准和测量表面标准的制造及其国际标准化

• 批准号: 21360062
• 负责人: YANAGI Kazuhisa
• 金额: $ 6.82万
• 依托单位: Nagaoka University of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2009
• 资助国家: 日本
• 起止时间: 2009 至 2011
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-21360062/
• 关键词: ナノ・マイクロ加工; 表面性状; 国際標準規格; 不確かさ; 測定標準面

Design guidelines and specifications of surface texture standards for calibrating areal surface texture measuring instruments and also verifying their metrological properties were established. Then, their fabrication processes and reproducing techniques have been developed. Profile and areal random topography data were generated using a novel mathematical model in particular for contact stylus instruments. And some material measures as the molds were manufactured by an ultra-precision machine tool. Their duplications were made by electro plating and nano in-printing techniques. Additionally chirp-like signal waveform with constant maximum slope was fabricated by FIB process. The evaluation values were given to those surface standards by taking uncertainties into account. Finally, analyzing the obtained remarks, we proposed new items as a draft of ISO/TC213 WG16 and accepted.

建立了用于面状表面纹理测量仪器标定和计量性能验证的表面纹理标准设计指南和规范。然后，开发了它们的制造工艺和复制技术。采用一种新颖的数学模型生成了接触式触控笔仪器的轮廓和面随机地形数据。并在超精密机床上对模具进行了一些材料测量。它们的复制品是通过电镀和纳米印刷技术制成的。此外，用FIB法制备了具有恒定最大斜率的类啁啾信号波形。在考虑不确定度的情况下，给出了这些表面标准的评价值。最后，通过分析得到的意见，我们提出了新的项目作为ISO/TC213 WG16的草案，并被接受。

项目成果

Generation of 3D random topography datasets with periodic boundaries for surface metrology algorithms and measurement standards

• DOI: 10.1016/j.wear.2010.04.035
• 发表时间: 2011-06-03
• 期刊: WEAR
• 影响因子: 5
• 作者: Uchidate, M.;Yanagi, K.;Iwabuchi, A.
• 通讯作者: Iwabuchi, A.

面領域の表面性状測定機を対象とした測定標準に関する研究-第1報粗さ測定用標準面の設計-

表面积表面粗糙度测量仪器测量标准的研究 第1部分：粗糙度测量标准表面的设计

• 发表时间: 2010
• 期刊: 精密工学会誌
• 作者: 根本賢太郎;柳和久;明田川正人;内舘道正;吉田一朗
• 通讯作者: 吉田一朗

面領域の表面性状評価-幾何特性のスケール依存と表記法

表面积的表面纹理评估-几何特性的尺度依赖性和表示方法

• 发表时间: 2010
• 作者: 柳和久;Francois Blateyron
• 通讯作者: Francois Blateyron

テクスチャ表面のトライボロジー(2)テクスチャ表面の性状評価

织构表面的摩擦学 (2) 织构表面的性能评价

• 发表时间: 2010
• 作者: Yasuhiro Takaya;Hideaki Tachika;Terutake Hayashi;Ken Kokubo;Keisuke Suzuki;堀切川一男;Wei Gao;柳和久
• 通讯作者: 柳和久

A study on response properties of surface texture measuring instruments in terms of surface wavelengths

表面粗糙度测量仪表面波长响应特性研究

• 发表时间: 2010
• 作者: Akihiko Fujii;Hitoshi Suzuki;Kazuhisa Yanali
• 通讯作者: Kazuhisa Yanali