Manufacture of calibration and measurement surface standards for areal surface texture measuring instruments and their international standardization

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Design guidelines and specifications of surface texture standards for calibrating areal surface texture measuring instruments and also verifying their metrological properties were established. Then, their fabrication processes and reproducing techniques have been developed. Profile and areal random topography data were generated using a novel mathematical model in particular for contact stylus instruments. And some material measures as the molds were manufactured by an ultra-precision machine tool. Their duplications were made by electro plating and nano in-printing techniques. Additionally chirp-like signal waveform with constant maximum slope was fabricated by FIB process. The evaluation values were given to those surface standards by taking uncertainties into account. Finally, analyzing the obtained remarks, we proposed new items as a draft of ISO/TC213 WG16 and accepted.