Development of High-Performance Spindle for Micro Factory for Machining Ultra-Precision Meso-Scale Parts

本研究旨在开发一种适用于加工中尺度精密零件的超精密加工系统的水驱动主轴。本课题的主要研究成果如下：1.水驱动主轴的研制（1）水驱动主轴的设计与制造。水静压轴承的设计，使轴承的高刚度可以通过优化的轴承限制器。（2）测量了所研制主轴的回转精度。实验表明，主轴跳动小于60nm。(3)It的压力脉动影响旋转精度。在主轴水动力系统中采用高效蓄能器。（4）控制系统，包括旋转式流量控制阀和控制软件，已经开发，以便水驱动主轴的速度可以保持不受负载变化。2.开发精密工作台（1）开发精密空气工作台。该平台直线度为50nm，直线运动定位精度为0.3μm。（2）研制了由水驱动主轴和空气载物台组成的小型超精密机床系统。3.金刚石车削评价主轴性能在研制的小型超精密机床上进行了金刚石车削试验。结果表明，加工表面具有良好的光学质量.表面粗糙度通常为30nm。

This research project has been conducted in order to develop a water drive spindle for ultra-precision machine system that is suitable for machining meso-scale precise parts. The crucial results of the project are the followings :1.Developed water drive spindle(1)Water drive spindle was newly designed and fabricated. Water hydrostatic bearings were designed so that high stiffness of the bearing can be obtained by optimizing the bearing restrictors.(2)Rotational accuracy of the developed spindle was measured. The experiments show that the spindle runnout is less than 60nm.(3)It is shown that the pressure pulsation affects rotational accuracy. An effective accumulator will be used to the water power system for the spindle.(4)Control system, including rotary-type flow control valve and control software has been developed so that speed of the water drive spindle can be maintained regardless of load change.2.Developed precision stage(1)A precision air stage has been developed. Straightness and positioning accuracy of linear motion of the stage were measured as 50nm and 0.3μm, respectively.(2)Small ultra-precision machine system, consisting of the water drive spindle and the air stage, has been fabricated.3.Evaluation of spindle performance by diamond tuningDiamond turning tests were performed using the developed small ultra-precision machine. The results show that the machined surfaces have optical quality surface. The surface roughness was typically 30nm.