Development of water driven ultra-precision machining system and diamond turning in temperature controlled water environment

发展了水驱阶段。然后，制作了由水驱动工作台和水驱动主轴组成的水驱动超精密机床系统。设计了一种水驱动工作台的速度控制系统，以调节金刚石车削加工过程中工作台的进给量。实验和仿真研究验证了该控制器能有效地调节工作台的进给和外载荷。然后将所开发的机床系统设置在水浴中，以获得更好的加工环境热稳定性。最后，利用开发的系统进行了金刚石车削试验。

The water driven stage was developed. Then the water driven ultra-precision machine tool system composed of the water driven stage and the water driven spindle was fabricated. A speed control system of the water driven stage was designed in order to regulate the feed of the table during diamond turning process of the developed machine tool system. The experimental and simulation studies verified that the controller effectively regulates the feed even external loads acting on the table of the stage. All the developed machine tool system was then set in water bath achieving better thermal stability of the machining environment. Finally, diamond-turning tests were carried out using developed system.