Integrated glove box system for optoelectronic thin films

许多材料对大气中的氧气或水分子敏感，因此无法在空气中可靠地合成或表征。因此，在本申请中，提出了一种集成手套箱阵列，其中可以在惰性气氛中自主地产生和表征（气氛敏感的）有机化合物和有机-无机化合物。有机-无机钙钛矿材料在这里特别发挥着重要作用，因为它们覆盖了大的带隙范围，因此可以与硅串联使用，而且还具有用于光电子学的潜力，例如用于激光器，发光二极管，量子传感器或医学领域的敏感探测器。至关重要的是，钙钛矿也是直接半导体，这意味着它们可以沉积在柔性衬底上。这开辟了新的可能性，例如在建筑物立面或车顶等曲面上的柔性太阳能电池。为此，计划使用四个相互连接的手套箱。在第一手套箱中，进行钙钛矿层和金属的热蒸发，这与例如钙钛矿/硅串联太阳能电池相关。此外，该手套箱还包含原子层沉积（ALD）装置，其用于共形地存款金属氧化物，例如，TiO 2或SnO 2，沉积到纹理化的Si太阳能电池上。特别地，ALD系统还需要钙钛矿上的透明顶部电极，其是钙钛矿-硅串联的基础，因为金属电极防止光穿过钙钛矿层到达硅子电池。ALD系统也可以在低温下操作，这允许研究特别对温度敏感的工艺以及有机夹层。ALD系统也适用于钙钛矿单结太阳能电池。此外，ITO（掺氟SnO 2）沉积可以在金属蒸发室中进行，以确保形成导电透明的终端层，这对串联太阳能电池至关重要。第二个手套箱用于制备各种钙钛矿、空穴导体层等。然后，这些材料可以通过蒸发（手套箱1）或湿化学方法（手套箱3）进行涂覆。第三个手套箱用于湿化学工艺，例如从液体前体施加薄钙钛矿层。这允许在柔性衬底上制造光电钙钛矿器件，如单结太阳能电池，发光二极管或传感器。第四手套箱用于表征光电器件（例如，太阳能电池的电流-电压特性）。该系统使得整个过程可以在受控条件下进行。

Many materials are sensitive to the oxygen or water molecules in the atmosphere and therefore cannot be reliably synthesized or characterized in air. Therefore, in this application an integrated glovebox array is presented in which (atmosphere-sensitive) organic and organic-inorganic compounds can be produced and characterized autonomously in an inert atmosphere. Organic-inorganic perovskite materials in particular play a major role here, as they cover a large bandgap range and can thus be used in a tandem approach with silicon, but also have the potential to be used in optoelectronics, e.g. for lasers, light-emitting diodes, quantum sensors or sensitive detectors in the medical field. Crucially, perovskites are also direct semiconductors, which means they can be deposited on flexible substrates. This opens up new possibilities, e.g. flexible solar cells on curved surfaces such as building facades or car roofs. Four interconnected glove boxes are planned for this purpose. In the first glove box, thermal evaporation of perovskite layers and metals is conducted, which is relevant e.g. for perovskite/silicon tandem solar cells. In addition, this glove box also contains an atomic layer deposition (ALD) setup, which is used to conformally deposit metal oxides, e.g., TiO2 or SnO2, onto textured Si solar cells. In particular, the ALD system is also requieed for transparent top electrodes on perovskites, which are the basis for a perovskite-silicon tandem, since the metallic electrodes prevent light from passing through the perovskite layer to the silicon sub-cell. The ALD system can also be operated at low temperatures, which allows the investigation of particularly temperature-sensitive processes, as well as organic interlayers. The ALD system is also suitable for perovskite single-junction solar cells. In addition, ITO (fluorine-doped SnO2) deposition is possible in the metal evaporation chamber to ensure a conductive transparent termination layer, which is essential for tandem solar cells.The second glove box is used to prepare the various perovskites, hole conductor layers, etc. These are then later either evaporated (glove box 1) or applied from wet-chemistry methods (glove box 3). The third glove box is used for wet chemical processes, such as applying thin perovskite layers from a liquid precursor. This allows the fabrication of optoelectronic perovskite devices like single-junction solar cells, light-emitting diodes or sensors on flexible substrates. The fourth glove box is used to characterize the optoelectronic devices (e.g., the current-voltage characteristic of a solar cell). The system is such that the entire process can take place under controlled conditions.