Integrated glove box system for optoelectronic thin films

许多材料对大气中的氧或水分子很敏感，因此不能在空气中可靠地合成或表征。因此，在本应用中，提出了一种集成手套箱阵列，其中（大气敏感）有机和有机-无机化合物可以在惰性气氛中自主生产和表征。特别是有机-无机钙钛矿材料在这里发挥着重要作用，因为它们覆盖了很大的带隙范围，因此可以与硅串联使用，但也有潜力用于光电子，例如激光，发光二极管，量子传感器或医疗领域的敏感探测器。至关重要的是，钙钛矿也是直接半导体，这意味着它们可以沉积在柔性衬底上。这开辟了新的可能性，例如，弯曲表面上的柔性太阳能电池，如建筑立面或车顶。为此，规划了四个相互连接的手套箱。在第一个手套箱中，钙钛矿层和金属进行热蒸发，这与钙钛矿/硅串联太阳能电池等相关。此外，这个手套箱还包含一个原子层沉积（ALD）装置，用于将金属氧化物（例如TiO2或SnO2）保形沉积到有纹理的硅太阳能电池上。特别是，由于金属电极阻止光穿过钙钛矿层进入硅亚电池，因此钙钛矿上的透明顶部电极也需要ALD系统，这是钙钛矿-硅串联的基础。ALD系统也可以在低温下工作，这使得对温度敏感的工艺以及有机夹层的研究成为可能。ALD系统也适用于钙钛矿单结太阳能电池。此外，ITO（氟掺杂SnO2）可以在金属蒸发室中沉积，以确保导电透明终端层，这对于串联太阳能电池至关重要。第二个手套箱用于制备各种钙钛矿、孔导体层等。然后将其蒸发（手套箱1）或通过湿化学方法（手套箱3）施用。第三个手套箱用于湿化学工艺，例如从液体前驱体中涂抹薄的钙钛矿层。这允许在柔性衬底上制造光电钙钛矿器件，如单结太阳能电池、发光二极管或传感器。第四个手套箱用于表征光电器件（例如，太阳能电池的电流-电压特性）。该系统是这样的，整个过程可以在受控条件下进行。

Many materials are sensitive to the oxygen or water molecules in the atmosphere and therefore cannot be reliably synthesized or characterized in air. Therefore, in this application an integrated glovebox array is presented in which (atmosphere-sensitive) organic and organic-inorganic compounds can be produced and characterized autonomously in an inert atmosphere. Organic-inorganic perovskite materials in particular play a major role here, as they cover a large bandgap range and can thus be used in a tandem approach with silicon, but also have the potential to be used in optoelectronics, e.g. for lasers, light-emitting diodes, quantum sensors or sensitive detectors in the medical field. Crucially, perovskites are also direct semiconductors, which means they can be deposited on flexible substrates. This opens up new possibilities, e.g. flexible solar cells on curved surfaces such as building facades or car roofs. Four interconnected glove boxes are planned for this purpose. In the first glove box, thermal evaporation of perovskite layers and metals is conducted, which is relevant e.g. for perovskite/silicon tandem solar cells. In addition, this glove box also contains an atomic layer deposition (ALD) setup, which is used to conformally deposit metal oxides, e.g., TiO2 or SnO2, onto textured Si solar cells. In particular, the ALD system is also requieed for transparent top electrodes on perovskites, which are the basis for a perovskite-silicon tandem, since the metallic electrodes prevent light from passing through the perovskite layer to the silicon sub-cell. The ALD system can also be operated at low temperatures, which allows the investigation of particularly temperature-sensitive processes, as well as organic interlayers. The ALD system is also suitable for perovskite single-junction solar cells. In addition, ITO (fluorine-doped SnO2) deposition is possible in the metal evaporation chamber to ensure a conductive transparent termination layer, which is essential for tandem solar cells.The second glove box is used to prepare the various perovskites, hole conductor layers, etc. These are then later either evaporated (glove box 1) or applied from wet-chemistry methods (glove box 3). The third glove box is used for wet chemical processes, such as applying thin perovskite layers from a liquid precursor. This allows the fabrication of optoelectronic perovskite devices like single-junction solar cells, light-emitting diodes or sensors on flexible substrates. The fourth glove box is used to characterize the optoelectronic devices (e.g., the current-voltage characteristic of a solar cell). The system is such that the entire process can take place under controlled conditions.